A Compact Vertical Scanner for Atomic Force Microscopes
A compact vertical scanner for an atomic force microscope (AFM) is developed. The vertical scanner is designed to have no interference with the optical microscope for viewing the cantilever. The theoretical stiffness and resonance of the scanner are derived and verified via finite element analysis....
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2010-11-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/10/12/10673/ |
| _version_ | 1811185089090945024 |
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| author | Jae Hong Park Jaesool Shim Dong-Yeon Lee |
| author_facet | Jae Hong Park Jaesool Shim Dong-Yeon Lee |
| author_sort | Jae Hong Park |
| collection | DOAJ |
| description | A compact vertical scanner for an atomic force microscope (AFM) is developed. The vertical scanner is designed to have no interference with the optical microscope for viewing the cantilever. The theoretical stiffness and resonance of the scanner are derived and verified via finite element analysis. An optimal design process that maximizes the resonance frequency is performed. To evaluate the scanner’s performance, experiments are performed to evaluate the travel range, resonance frequency, and feedback noise level. In addition, an AFM image using the proposed vertical scanner is generated. |
| first_indexed | 2024-04-11T13:23:35Z |
| format | Article |
| id | doaj.art-735b8c6c0e7b4cd5a389e2415bb1bc80 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T13:23:35Z |
| publishDate | 2010-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-735b8c6c0e7b4cd5a389e2415bb1bc802022-12-22T04:22:08ZengMDPI AGSensors1424-82202010-11-011012106731068210.3390/s101210673A Compact Vertical Scanner for Atomic Force MicroscopesJae Hong ParkJaesool ShimDong-Yeon LeeA compact vertical scanner for an atomic force microscope (AFM) is developed. The vertical scanner is designed to have no interference with the optical microscope for viewing the cantilever. The theoretical stiffness and resonance of the scanner are derived and verified via finite element analysis. An optimal design process that maximizes the resonance frequency is performed. To evaluate the scanner’s performance, experiments are performed to evaluate the travel range, resonance frequency, and feedback noise level. In addition, an AFM image using the proposed vertical scanner is generated.http://www.mdpi.com/1424-8220/10/12/10673/nano-scanneratomic force microscopeflexure-guidepiezoelectric actuatornano-sensor |
| spellingShingle | Jae Hong Park Jaesool Shim Dong-Yeon Lee A Compact Vertical Scanner for Atomic Force Microscopes Sensors nano-scanner atomic force microscope flexure-guide piezoelectric actuator nano-sensor |
| title | A Compact Vertical Scanner for Atomic Force Microscopes |
| title_full | A Compact Vertical Scanner for Atomic Force Microscopes |
| title_fullStr | A Compact Vertical Scanner for Atomic Force Microscopes |
| title_full_unstemmed | A Compact Vertical Scanner for Atomic Force Microscopes |
| title_short | A Compact Vertical Scanner for Atomic Force Microscopes |
| title_sort | compact vertical scanner for atomic force microscopes |
| topic | nano-scanner atomic force microscope flexure-guide piezoelectric actuator nano-sensor |
| url | http://www.mdpi.com/1424-8220/10/12/10673/ |
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