A Compact Vertical Scanner for Atomic Force Microscopes

A Compact Vertical Scanner for Atomic Force Microscopes

A compact vertical scanner for an atomic force microscope (AFM) is developed. The vertical scanner is designed to have no interference with the optical microscope for viewing the cantilever. The theoretical stiffness and resonance of the scanner are derived and verified via finite element analysis....

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Bibliographic Details
Main Authors:	Jae Hong Park, Jaesool Shim, Dong-Yeon Lee
Format:	Article
Language:	English
Published:	MDPI AG 2010-11-01
Series:	Sensors
Subjects:	nano-scanner atomic force microscope flexure-guide piezoelectric actuator nano-sensor
Online Access:	http://www.mdpi.com/1424-8220/10/12/10673/

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