An XPS method for layer profiling of NbN thin films

An XPS method for layer profiling of NbN thin films

Layer chemical and phase profiling of niobium nitride thin films on a silicon substrate oxidized on air was performed with the help of a method designed by us. The method includes: a new method of background subtraction of multiple inelastically scattered photoelectrons considering depth inhomogenei...

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Bibliographic Details
Main Authors: Lubenchenko A.V., Batrakov A.A., Pavolotsky A.B., Krause S., Shurkaeva I.V., Lubenchenko O.I., Ivanov D.A.
Format: Article
Language:English
Published: EDP Sciences 2017-01-01
Series:EPJ Web of Conferences
Online Access:http://dx.doi.org/10.1051/epjconf/201713203053

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