Effect of Nitrogen Doping on Tribological Properties of Ta<sub>2</sub>O<sub>5</sub> Coatings Deposited by RF Magnetron Sputtering

Effect of Nitrogen Doping on Tribological Properties of Ta<sub>2</sub>O<sub>5</sub> Coatings Deposited by RF Magnetron Sputtering

Ta<sub>2</sub>O<sub>5</sub> was deposited on quartz glass and Si substrates as a protective coating. The inherent RF magnetron sputtering power of 140 W was maintained during the deposition process. During the deposition process, amounts of 5%, 10%, and 15% of N<sub>2&l...

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Bibliographic Details
Main Authors: Rui Chao, Haichao Cai, Hang Li, Yujun Xue
Format: Article
Language:English
Published: MDPI AG 2022-11-01
Series:Materials
Subjects:
magnetron sputtering
Ta<sub>2</sub>O<sub>5</sub>
TaN
friction
wear
surface morphology
Online Access:https://www.mdpi.com/1996-1944/15/23/8291

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