A Readout Circuit for MEMS Gas Sensor
In recent years, the application of gas sensors is becoming more and more extensive. Driven by potential applications such as the Internet of Things, its technology development direction begins with miniaturization, integration, modularization, and intelligence. However, there is a bottleneck in the...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-01-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/14/1/150 |
| _version_ | 1797438592466812928 |
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| author | Shengle Ren Mingyuan Ren Honghai Xu |
| author_facet | Shengle Ren Mingyuan Ren Honghai Xu |
| author_sort | Shengle Ren |
| collection | DOAJ |
| description | In recent years, the application of gas sensors is becoming more and more extensive. Driven by potential applications such as the Internet of Things, its technology development direction begins with miniaturization, integration, modularization, and intelligence. However, there is a bottleneck in the research of interface circuits, which restricts the development of gas sensors in volume, power consumption, and intelligence. To solve this problem, a MEMS gas sensor interface circuit based on ADC technology is proposed in this paper. Under the condition of the Huahong 110 nm process, the working voltage is 3.3 V, the resistance change of 100 Ω~1 MΩ can be detected, the conversion error is in the range of 0.5~1%, and the maximum power consumption is 986 μW. The overall layout area is 0.49 × 0.77 mm<sup>2</sup>. Finally, the correctness of the circuit function is verified by post-layout simulation. |
| first_indexed | 2024-03-09T11:40:18Z |
| format | Article |
| id | doaj.art-74ec37bbc5d541a7a62f2f648a403397 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T11:40:18Z |
| publishDate | 2023-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-74ec37bbc5d541a7a62f2f648a4033972023-11-30T23:33:53ZengMDPI AGMicromachines2072-666X2023-01-0114115010.3390/mi14010150A Readout Circuit for MEMS Gas SensorShengle Ren0Mingyuan Ren1Honghai Xu2College of Electrical and Information Engineering, Quzhou Universiy, Quzhou 324000, ChinaJinhua Advanced Research Institute, Jinhua 321013, ChinaSchool of Computer Science and Technology, Harbin University of Science and Technology, Harbin 150080, ChinaIn recent years, the application of gas sensors is becoming more and more extensive. Driven by potential applications such as the Internet of Things, its technology development direction begins with miniaturization, integration, modularization, and intelligence. However, there is a bottleneck in the research of interface circuits, which restricts the development of gas sensors in volume, power consumption, and intelligence. To solve this problem, a MEMS gas sensor interface circuit based on ADC technology is proposed in this paper. Under the condition of the Huahong 110 nm process, the working voltage is 3.3 V, the resistance change of 100 Ω~1 MΩ can be detected, the conversion error is in the range of 0.5~1%, and the maximum power consumption is 986 μW. The overall layout area is 0.49 × 0.77 mm<sup>2</sup>. Finally, the correctness of the circuit function is verified by post-layout simulation.https://www.mdpi.com/2072-666X/14/1/150MEMS gas sensorinterface circuitADC |
| spellingShingle | Shengle Ren Mingyuan Ren Honghai Xu A Readout Circuit for MEMS Gas Sensor Micromachines MEMS gas sensor interface circuit ADC |
| title | A Readout Circuit for MEMS Gas Sensor |
| title_full | A Readout Circuit for MEMS Gas Sensor |
| title_fullStr | A Readout Circuit for MEMS Gas Sensor |
| title_full_unstemmed | A Readout Circuit for MEMS Gas Sensor |
| title_short | A Readout Circuit for MEMS Gas Sensor |
| title_sort | readout circuit for mems gas sensor |
| topic | MEMS gas sensor interface circuit ADC |
| url | https://www.mdpi.com/2072-666X/14/1/150 |
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