Design and Optimization of Hemispherical Resonators Based on PSO-BP and NSGA-II
Although one of the poster children of high-performance MEMS (Micro Electro Mechanical Systems) gyroscopes, the MEMS hemispherical resonator gyroscope (HRG) is faced with the barrier of technical and process limits, which makes it unable to form a resonator with the best structure. How to obtain the...
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| Format: | Article |
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MDPI AG
2023-05-01
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| Online Access: | https://www.mdpi.com/2072-666X/14/5/1054 |
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| author | Jinghao Liu Pinghua Li Xuye Zhuang Yunlong Sheng Qi Qiao Mingchen Lv Zhongfeng Gao Jialuo Liao |
| author_facet | Jinghao Liu Pinghua Li Xuye Zhuang Yunlong Sheng Qi Qiao Mingchen Lv Zhongfeng Gao Jialuo Liao |
| author_sort | Jinghao Liu |
| collection | DOAJ |
| description | Although one of the poster children of high-performance MEMS (Micro Electro Mechanical Systems) gyroscopes, the MEMS hemispherical resonator gyroscope (HRG) is faced with the barrier of technical and process limits, which makes it unable to form a resonator with the best structure. How to obtain the best resonator under specific technical and process limits is a significant topic for us. In this paper, the optimization of a MEMS polysilicon hemispherical resonator, designed by patterns based on PSO-BP and NSGA-II, was introduced. Firstly, the geometric parameters that significantly contribute to the performance of the resonator were determined via a thermoelastic model and process characteristics. Variety regulation between its performance parameters and geometric characteristics was discovered preliminarily using finite element simulation under a specified range. Then, the mapping between performance parameters and structure parameters was determined and stored in the BP neural network, which was optimized via PSO. Finally, the structure parameters in a specific numerical range corresponding to the best performance were obtained via the selection, heredity, and variation of NSGAII. Additionally, it was demonstrated using commercial finite element soft analysis that the output of the NSGAII, which corresponded to the Q factor of 42,454 and frequency difference of 8539, was a better structure for the resonator (generated by polysilicon under this process within a selected range) than the original. Instead of experimental processing, this study provides an effective and economical alternative for the design and optimization of high-performance HRGs under specific technical and process limits. |
| first_indexed | 2024-03-11T03:29:16Z |
| format | Article |
| id | doaj.art-74f1e0fd42764b919e23f90b7cd34ac0 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-11T03:29:16Z |
| publishDate | 2023-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-74f1e0fd42764b919e23f90b7cd34ac02023-11-18T02:31:06ZengMDPI AGMicromachines2072-666X2023-05-01145105410.3390/mi14051054Design and Optimization of Hemispherical Resonators Based on PSO-BP and NSGA-IIJinghao Liu0Pinghua Li1Xuye Zhuang2Yunlong Sheng3Qi Qiao4Mingchen Lv5Zhongfeng Gao6Jialuo Liao7College of Mechanical Engineering, Shandong University of Technology, Zibo 255000, ChinaCollege of Mechanical Engineering, Shandong University of Technology, Zibo 255000, ChinaCollege of Mechanical Engineering, Shandong University of Technology, Zibo 255000, ChinaCollege of Mechanical Engineering, Shandong University of Technology, Zibo 255000, ChinaCollege of Mechanical Engineering, Shandong University of Technology, Zibo 255000, ChinaCollege of Mechanical Engineering, Shandong University of Technology, Zibo 255000, ChinaCollege of Mechanical Engineering, Shandong University of Technology, Zibo 255000, ChinaCollege of Mechanical Engineering, Shandong University of Technology, Zibo 255000, ChinaAlthough one of the poster children of high-performance MEMS (Micro Electro Mechanical Systems) gyroscopes, the MEMS hemispherical resonator gyroscope (HRG) is faced with the barrier of technical and process limits, which makes it unable to form a resonator with the best structure. How to obtain the best resonator under specific technical and process limits is a significant topic for us. In this paper, the optimization of a MEMS polysilicon hemispherical resonator, designed by patterns based on PSO-BP and NSGA-II, was introduced. Firstly, the geometric parameters that significantly contribute to the performance of the resonator were determined via a thermoelastic model and process characteristics. Variety regulation between its performance parameters and geometric characteristics was discovered preliminarily using finite element simulation under a specified range. Then, the mapping between performance parameters and structure parameters was determined and stored in the BP neural network, which was optimized via PSO. Finally, the structure parameters in a specific numerical range corresponding to the best performance were obtained via the selection, heredity, and variation of NSGAII. Additionally, it was demonstrated using commercial finite element soft analysis that the output of the NSGAII, which corresponded to the Q factor of 42,454 and frequency difference of 8539, was a better structure for the resonator (generated by polysilicon under this process within a selected range) than the original. Instead of experimental processing, this study provides an effective and economical alternative for the design and optimization of high-performance HRGs under specific technical and process limits.https://www.mdpi.com/2072-666X/14/5/1054PSOBP neural networkNSGA-IIMEMS HRG |
| spellingShingle | Jinghao Liu Pinghua Li Xuye Zhuang Yunlong Sheng Qi Qiao Mingchen Lv Zhongfeng Gao Jialuo Liao Design and Optimization of Hemispherical Resonators Based on PSO-BP and NSGA-II Micromachines PSO BP neural network NSGA-II MEMS HRG |
| title | Design and Optimization of Hemispherical Resonators Based on PSO-BP and NSGA-II |
| title_full | Design and Optimization of Hemispherical Resonators Based on PSO-BP and NSGA-II |
| title_fullStr | Design and Optimization of Hemispherical Resonators Based on PSO-BP and NSGA-II |
| title_full_unstemmed | Design and Optimization of Hemispherical Resonators Based on PSO-BP and NSGA-II |
| title_short | Design and Optimization of Hemispherical Resonators Based on PSO-BP and NSGA-II |
| title_sort | design and optimization of hemispherical resonators based on pso bp and nsga ii |
| topic | PSO BP neural network NSGA-II MEMS HRG |
| url | https://www.mdpi.com/2072-666X/14/5/1054 |
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