Effects of nitrogen flow ratio on the structural, mechanical, and anticorrosive properties of co-sputtered (NbTaMoW)Nx films
In this study (NbTaMoW)Nx films were fabricated through reactive co-sputtering using four pure-element targets at various nitrogen flow ratios (RN2). It was also explored the phase structures, mechanical properties, and corrosion resistance properties of these films. The results indicated that the s...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2022-11-01
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| Series: | Journal of Materials Research and Technology |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S223878542201571X |