An Insertable Passive LC Pressure Sensor Based on an Alumina Ceramic for In Situ Pressure Sensing in High-Temperature Environments
Pressure measurements in high-temperature applications, including compressors, turbines, and others, have become increasingly critical. This paper proposes an implantable passive LC pressure sensor based on an alumina ceramic material for in situ pressure sensing in high-temperature environments. Th...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2015-08-01
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| Series: | Sensors |
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| Online Access: | http://www.mdpi.com/1424-8220/15/9/21844 |
| _version_ | 1811184005935005696 |
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| author | Jijun Xiong Chen Li Pinggang Jia Xiaoyong Chen Wendong Zhang Jun Liu Chenyang Xue Qiulin Tan |
| author_facet | Jijun Xiong Chen Li Pinggang Jia Xiaoyong Chen Wendong Zhang Jun Liu Chenyang Xue Qiulin Tan |
| author_sort | Jijun Xiong |
| collection | DOAJ |
| description | Pressure measurements in high-temperature applications, including compressors, turbines, and others, have become increasingly critical. This paper proposes an implantable passive LC pressure sensor based on an alumina ceramic material for in situ pressure sensing in high-temperature environments. The inductance and capacitance elements of the sensor were designed independently and separated by a thermally insulating material, which is conducive to reducing the influence of the temperature on the inductance element and improving the quality factor of the sensor. In addition, the sensor was fabricated using thick film integrated technology from high-temperature materials that ensure stable operation of the sensor in high-temperature environments. Experimental results showed that the sensor accurately monitored pressures from 0 bar to 2 bar at temperatures up to 800 °C. The sensitivity, linearity, repeatability error, and hysteretic error of the sensor were 0.225 MHz/bar, 95.3%, 5.5%, and 6.2%, respectively. |
| first_indexed | 2024-04-11T13:06:06Z |
| format | Article |
| id | doaj.art-75808dd820314783b7909f5a16a0021c |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T13:06:06Z |
| publishDate | 2015-08-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-75808dd820314783b7909f5a16a0021c2022-12-22T04:22:45ZengMDPI AGSensors1424-82202015-08-01159218442185610.3390/s150921844s150921844An Insertable Passive LC Pressure Sensor Based on an Alumina Ceramic for In Situ Pressure Sensing in High-Temperature EnvironmentsJijun Xiong0Chen Li1Pinggang Jia2Xiaoyong Chen3Wendong Zhang4Jun Liu5Chenyang Xue6Qiulin Tan7Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, ChinaScience and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, ChinaScience and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, ChinaPressure measurements in high-temperature applications, including compressors, turbines, and others, have become increasingly critical. This paper proposes an implantable passive LC pressure sensor based on an alumina ceramic material for in situ pressure sensing in high-temperature environments. The inductance and capacitance elements of the sensor were designed independently and separated by a thermally insulating material, which is conducive to reducing the influence of the temperature on the inductance element and improving the quality factor of the sensor. In addition, the sensor was fabricated using thick film integrated technology from high-temperature materials that ensure stable operation of the sensor in high-temperature environments. Experimental results showed that the sensor accurately monitored pressures from 0 bar to 2 bar at temperatures up to 800 °C. The sensitivity, linearity, repeatability error, and hysteretic error of the sensor were 0.225 MHz/bar, 95.3%, 5.5%, and 6.2%, respectively.http://www.mdpi.com/1424-8220/15/9/21844passive LC pressure sensorAlumina ceramicPressure measurementHigh-temperature application |
| spellingShingle | Jijun Xiong Chen Li Pinggang Jia Xiaoyong Chen Wendong Zhang Jun Liu Chenyang Xue Qiulin Tan An Insertable Passive LC Pressure Sensor Based on an Alumina Ceramic for In Situ Pressure Sensing in High-Temperature Environments Sensors passive LC pressure sensor Alumina ceramic Pressure measurement High-temperature application |
| title | An Insertable Passive LC Pressure Sensor Based on an Alumina Ceramic for In Situ Pressure Sensing in High-Temperature Environments |
| title_full | An Insertable Passive LC Pressure Sensor Based on an Alumina Ceramic for In Situ Pressure Sensing in High-Temperature Environments |
| title_fullStr | An Insertable Passive LC Pressure Sensor Based on an Alumina Ceramic for In Situ Pressure Sensing in High-Temperature Environments |
| title_full_unstemmed | An Insertable Passive LC Pressure Sensor Based on an Alumina Ceramic for In Situ Pressure Sensing in High-Temperature Environments |
| title_short | An Insertable Passive LC Pressure Sensor Based on an Alumina Ceramic for In Situ Pressure Sensing in High-Temperature Environments |
| title_sort | insertable passive lc pressure sensor based on an alumina ceramic for in situ pressure sensing in high temperature environments |
| topic | passive LC pressure sensor Alumina ceramic Pressure measurement High-temperature application |
| url | http://www.mdpi.com/1424-8220/15/9/21844 |
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