Fast Fabrication Nanopores on a PMMA Membrane by a Local High Electric Field Controlled Breakdown

The sensitivity and accuracy of nanopore sensors are severely hindered by the high noise associated with solid-state nanopores. To mitigate this issue, the deposition of organic polymer materials onto silicon nitride (<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML"...

Full description

Bibliographic Details
Main Authors: Shaoxi Fang, Delin Zeng, Shixuan He, Yadong Li, Zichen Pang, Yunjiao Wang, Liyuan Liang, Ting Weng, Wanyi Xie, Deqiang Wang
Format: Article
Language:English
Published: MDPI AG 2024-03-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/24/7/2109
_version_ 1797211952251928576
author Shaoxi Fang
Delin Zeng
Shixuan He
Yadong Li
Zichen Pang
Yunjiao Wang
Liyuan Liang
Ting Weng
Wanyi Xie
Deqiang Wang
author_facet Shaoxi Fang
Delin Zeng
Shixuan He
Yadong Li
Zichen Pang
Yunjiao Wang
Liyuan Liang
Ting Weng
Wanyi Xie
Deqiang Wang
author_sort Shaoxi Fang
collection DOAJ
description The sensitivity and accuracy of nanopore sensors are severely hindered by the high noise associated with solid-state nanopores. To mitigate this issue, the deposition of organic polymer materials onto silicon nitride (<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mi>S</mi><mi>i</mi><msub><mi>N</mi><mi>x</mi></msub></mrow></semantics></math></inline-formula>) membranes has been effective in obtaining low-noise measurements. Nonetheless, the fabrication of nanopores sub-10 nm on thin polymer membranes remains a significant challenge. This work proposes a method for fabricating nanopores on polymethyl methacrylate (PMMA) membrane by the local high electrical field controlled breakdown, exploring the impact of voltage and current on the breakdown of PMMA membranes and discussing the mechanism underlying the breakdown voltage and current during the formation of nanopores. By improving the electric field application method, transient high electric fields that are one–seven times higher than the breakdown electric field can be utilized to fabricate nanopores. A comparative analysis was performed on the current noise levels of nanopores in PMMA-<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mi>S</mi><mi>i</mi><msub><mi>N</mi><mi>x</mi></msub></mrow></semantics></math></inline-formula> composite membranes and <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mi>S</mi><mi>i</mi><msub><mi>N</mi><mi>x</mi></msub></mrow></semantics></math></inline-formula> nanopores with a 5 nm diameter. The results demonstrated that the fast fabrication of nanopores on PMMA-<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mi>S</mi><mi>i</mi><msub><mi>N</mi><mi>x</mi></msub></mrow></semantics></math></inline-formula> membranes exhibited reduced current noise compared to <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mi>S</mi><mi>i</mi><msub><mi>N</mi><mi>x</mi></msub></mrow></semantics></math></inline-formula> nanopores. This finding provides evidence supporting the feasibility of utilizing this technology for efficiently fabricating low-noise nanopores on polymer composite membranes.
first_indexed 2024-04-24T10:34:39Z
format Article
id doaj.art-75e3665d07104f0da3fb91c65554de39
institution Directory Open Access Journal
issn 1424-8220
language English
last_indexed 2024-04-24T10:34:39Z
publishDate 2024-03-01
publisher MDPI AG
record_format Article
series Sensors
spelling doaj.art-75e3665d07104f0da3fb91c65554de392024-04-12T13:26:14ZengMDPI AGSensors1424-82202024-03-01247210910.3390/s24072109Fast Fabrication Nanopores on a PMMA Membrane by a Local High Electric Field Controlled BreakdownShaoxi Fang0Delin Zeng1Shixuan He2Yadong Li3Zichen Pang4Yunjiao Wang5Liyuan Liang6Ting Weng7Wanyi Xie8Deqiang Wang9Chongqing Key Laboratory of Multi-Scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, ChinaSchool of Optoelectronic Engineering, Chongqing University of Posts and Telecommunications, Chongqing 400065, ChinaChongqing Key Laboratory of Multi-Scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, ChinaSchool of Optoelectronic Engineering, Chongqing University of Posts and Telecommunications, Chongqing 400065, ChinaSchool of Optoelectronic Engineering, Chongqing University of Posts and Telecommunications, Chongqing 400065, ChinaChongqing Key Laboratory of Multi-Scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, ChinaChongqing Key Laboratory of Multi-Scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, ChinaChongqing Key Laboratory of Multi-Scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, ChinaChongqing Key Laboratory of Multi-Scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, ChinaChongqing Key Laboratory of Multi-Scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, ChinaThe sensitivity and accuracy of nanopore sensors are severely hindered by the high noise associated with solid-state nanopores. To mitigate this issue, the deposition of organic polymer materials onto silicon nitride (<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mi>S</mi><mi>i</mi><msub><mi>N</mi><mi>x</mi></msub></mrow></semantics></math></inline-formula>) membranes has been effective in obtaining low-noise measurements. Nonetheless, the fabrication of nanopores sub-10 nm on thin polymer membranes remains a significant challenge. This work proposes a method for fabricating nanopores on polymethyl methacrylate (PMMA) membrane by the local high electrical field controlled breakdown, exploring the impact of voltage and current on the breakdown of PMMA membranes and discussing the mechanism underlying the breakdown voltage and current during the formation of nanopores. By improving the electric field application method, transient high electric fields that are one–seven times higher than the breakdown electric field can be utilized to fabricate nanopores. A comparative analysis was performed on the current noise levels of nanopores in PMMA-<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mi>S</mi><mi>i</mi><msub><mi>N</mi><mi>x</mi></msub></mrow></semantics></math></inline-formula> composite membranes and <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mi>S</mi><mi>i</mi><msub><mi>N</mi><mi>x</mi></msub></mrow></semantics></math></inline-formula> nanopores with a 5 nm diameter. The results demonstrated that the fast fabrication of nanopores on PMMA-<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mi>S</mi><mi>i</mi><msub><mi>N</mi><mi>x</mi></msub></mrow></semantics></math></inline-formula> membranes exhibited reduced current noise compared to <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mi>S</mi><mi>i</mi><msub><mi>N</mi><mi>x</mi></msub></mrow></semantics></math></inline-formula> nanopores. This finding provides evidence supporting the feasibility of utilizing this technology for efficiently fabricating low-noise nanopores on polymer composite membranes.https://www.mdpi.com/1424-8220/24/7/2109PMMAnanoporecontrolled breakdownlocal high electric fieldlow noise
spellingShingle Shaoxi Fang
Delin Zeng
Shixuan He
Yadong Li
Zichen Pang
Yunjiao Wang
Liyuan Liang
Ting Weng
Wanyi Xie
Deqiang Wang
Fast Fabrication Nanopores on a PMMA Membrane by a Local High Electric Field Controlled Breakdown
Sensors
PMMA
nanopore
controlled breakdown
local high electric field
low noise
title Fast Fabrication Nanopores on a PMMA Membrane by a Local High Electric Field Controlled Breakdown
title_full Fast Fabrication Nanopores on a PMMA Membrane by a Local High Electric Field Controlled Breakdown
title_fullStr Fast Fabrication Nanopores on a PMMA Membrane by a Local High Electric Field Controlled Breakdown
title_full_unstemmed Fast Fabrication Nanopores on a PMMA Membrane by a Local High Electric Field Controlled Breakdown
title_short Fast Fabrication Nanopores on a PMMA Membrane by a Local High Electric Field Controlled Breakdown
title_sort fast fabrication nanopores on a pmma membrane by a local high electric field controlled breakdown
topic PMMA
nanopore
controlled breakdown
local high electric field
low noise
url https://www.mdpi.com/1424-8220/24/7/2109
work_keys_str_mv AT shaoxifang fastfabricationnanoporesonapmmamembranebyalocalhighelectricfieldcontrolledbreakdown
AT delinzeng fastfabricationnanoporesonapmmamembranebyalocalhighelectricfieldcontrolledbreakdown
AT shixuanhe fastfabricationnanoporesonapmmamembranebyalocalhighelectricfieldcontrolledbreakdown
AT yadongli fastfabricationnanoporesonapmmamembranebyalocalhighelectricfieldcontrolledbreakdown
AT zichenpang fastfabricationnanoporesonapmmamembranebyalocalhighelectricfieldcontrolledbreakdown
AT yunjiaowang fastfabricationnanoporesonapmmamembranebyalocalhighelectricfieldcontrolledbreakdown
AT liyuanliang fastfabricationnanoporesonapmmamembranebyalocalhighelectricfieldcontrolledbreakdown
AT tingweng fastfabricationnanoporesonapmmamembranebyalocalhighelectricfieldcontrolledbreakdown
AT wanyixie fastfabricationnanoporesonapmmamembranebyalocalhighelectricfieldcontrolledbreakdown
AT deqiangwang fastfabricationnanoporesonapmmamembranebyalocalhighelectricfieldcontrolledbreakdown