| Summary: | Superlattice [Co90Fe10(0.21)/Pt(0.23)]n (unit in nm) with the repeat cycles n ranging from 3 to 30 were studied. Both effective anisotropy (Keff) and PMA constant (KU) reached a maximum at n=8. When the 3 nm Pt underlayer was deposited at low energy condition, the Keff and KU of (CoFe/Pt)8 are 4.0 and 6.1 Merg/cc, respectively. On the other hand, the Keff and KU increased to 6.8 and 9.7 Merg/cc, respectively, when the Pt underlayer deposited at high energy condition. As the n increases, the surface roughness monotonously increases and d111 inside the superlattice layers increase and relax from bottom to top part. The interface roughness and relaxation in superlattice reduce the PMA considerably.
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