Fabrication of a Highly Sensitive Chemical Sensor Based on ZnO Nanorod Arrays

<p>Abstract</p> <p>We report a novel method for fabricating a highly sensitive chemical sensor based on a ZnO nanorod array that is epitaxially grown on a Pt-coated Si substrate, with a top&#8211;top electrode configuration. To practically test the device, its O<sub>2<...

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Bibliographic Details
Main Authors: Park JaeYoung, Choi Sun-Woo, Kim SangSub
Format: Article
Language:English
Published: SpringerOpen 2009-01-01
Series:Nanoscale Research Letters
Subjects:
Online Access:http://dx.doi.org/10.1007/s11671-009-9487-3