HRXRD study of the effect of a nanoporous silicon layer on the epitaxial growth quality of GaN layer on the templates of SiC/por-Si/c-Si

HRXRD study of the effect of a nanoporous silicon layer on the epitaxial growth quality of GaN layer on the templates of SiC/por-Si/c-Si

Using High Resolution X-ray Diffraction (HRXRD) diagnostic techniques the influence of the transition layer of nanoporous silicon on the practical implementation and certain features of the epitaxial growth of GaN layers with the use of molecular beam epitaxy were investigated by means of plasma act...

書誌詳細
主要な著者:	P.V. Seredin, H. Leiste, A.S. Lenshin, A.M. Mizerov
フォーマット:	論文
言語:	English
出版事項:	Elsevier 2020-03-01
シリーズ:	Results in Physics
主題:	GaN SiC por-Si MBE PA HRXRD
オンライン･アクセス:	http://www.sciencedirect.com/science/article/pii/S2211379719334503

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