Broadband Antireflection Coatings Made of Resonant Submicron- and Micron-Sized SiGe Particles Grown on Si Substrates
The solid-state dewetting phenomenon was used to obtain submicron- and micron-sized SiGe particle arrays by the Ge deposition on Si(100) substrates. Their transmission and reflection spectra were measured and numerically modeled by the FDTD method. They exhibit resonance effects in broad infrared sp...
Main Authors: | , |
---|---|
Format: | Article |
Language: | English |
Published: |
IEEE
2021-01-01
|
Series: | IEEE Photonics Journal |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/9435026/ |
_version_ | 1811234232837603328 |
---|---|
author | Alexander A. Shklyaev Andrei V. Tsarev |
author_facet | Alexander A. Shklyaev Andrei V. Tsarev |
author_sort | Alexander A. Shklyaev |
collection | DOAJ |
description | The solid-state dewetting phenomenon was used to obtain submicron- and micron-sized SiGe particle arrays by the Ge deposition on Si(100) substrates. Their transmission and reflection spectra were measured and numerically modeled by the FDTD method. They exhibit resonance effects in broad infrared spectral ranges, depending on the particle size. The broadband antireflection property is associated with wide particle size distributions and the influence of a high-index substrate. The results show that the dewetting phenomenon provides the natural formation of arrays of particles shaped as close to a sphere segment, and they turned out to be effective as antireflection coatings. |
first_indexed | 2024-04-12T11:33:16Z |
format | Article |
id | doaj.art-76dc78bbc50a4889a13bdf7bd884edfd |
institution | Directory Open Access Journal |
issn | 1943-0655 |
language | English |
last_indexed | 2024-04-12T11:33:16Z |
publishDate | 2021-01-01 |
publisher | IEEE |
record_format | Article |
series | IEEE Photonics Journal |
spelling | doaj.art-76dc78bbc50a4889a13bdf7bd884edfd2022-12-22T03:34:55ZengIEEEIEEE Photonics Journal1943-06552021-01-0113311210.1109/JPHOT.2021.30811009435026Broadband Antireflection Coatings Made of Resonant Submicron- and Micron-Sized SiGe Particles Grown on Si SubstratesAlexander A. Shklyaev0https://orcid.org/0000-0001-7271-3921Andrei V. Tsarev1https://orcid.org/0000-0002-6435-8330Novosibirsk State University, Novosibirsk, RussiaNovosibirsk State University, Novosibirsk, RussiaThe solid-state dewetting phenomenon was used to obtain submicron- and micron-sized SiGe particle arrays by the Ge deposition on Si(100) substrates. Their transmission and reflection spectra were measured and numerically modeled by the FDTD method. They exhibit resonance effects in broad infrared spectral ranges, depending on the particle size. The broadband antireflection property is associated with wide particle size distributions and the influence of a high-index substrate. The results show that the dewetting phenomenon provides the natural formation of arrays of particles shaped as close to a sphere segment, and they turned out to be effective as antireflection coatings.https://ieeexplore.ieee.org/document/9435026/Thin film coatingsoptical properties of photonic materialsmetamaterialsfabrication and characterizationnumerical simulationFDTD method |
spellingShingle | Alexander A. Shklyaev Andrei V. Tsarev Broadband Antireflection Coatings Made of Resonant Submicron- and Micron-Sized SiGe Particles Grown on Si Substrates IEEE Photonics Journal Thin film coatings optical properties of photonic materials metamaterials fabrication and characterization numerical simulation FDTD method |
title | Broadband Antireflection Coatings Made of Resonant Submicron- and Micron-Sized SiGe Particles Grown on Si Substrates |
title_full | Broadband Antireflection Coatings Made of Resonant Submicron- and Micron-Sized SiGe Particles Grown on Si Substrates |
title_fullStr | Broadband Antireflection Coatings Made of Resonant Submicron- and Micron-Sized SiGe Particles Grown on Si Substrates |
title_full_unstemmed | Broadband Antireflection Coatings Made of Resonant Submicron- and Micron-Sized SiGe Particles Grown on Si Substrates |
title_short | Broadband Antireflection Coatings Made of Resonant Submicron- and Micron-Sized SiGe Particles Grown on Si Substrates |
title_sort | broadband antireflection coatings made of resonant submicron and micron sized sige particles grown on si substrates |
topic | Thin film coatings optical properties of photonic materials metamaterials fabrication and characterization numerical simulation FDTD method |
url | https://ieeexplore.ieee.org/document/9435026/ |
work_keys_str_mv | AT alexanderashklyaev broadbandantireflectioncoatingsmadeofresonantsubmicronandmicronsizedsigeparticlesgrownonsisubstrates AT andreivtsarev broadbandantireflectioncoatingsmadeofresonantsubmicronandmicronsizedsigeparticlesgrownonsisubstrates |