Broadband Antireflection Coatings Made of Resonant Submicron- and Micron-Sized SiGe Particles Grown on Si Substrates

The solid-state dewetting phenomenon was used to obtain submicron- and micron-sized SiGe particle arrays by the Ge deposition on Si(100) substrates. Their transmission and reflection spectra were measured and numerically modeled by the FDTD method. They exhibit resonance effects in broad infrared sp...

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Main Authors: Alexander A. Shklyaev, Andrei V. Tsarev
Format: Article
Language:English
Published: IEEE 2021-01-01
Series:IEEE Photonics Journal
Subjects:
Online Access:https://ieeexplore.ieee.org/document/9435026/
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author Alexander A. Shklyaev
Andrei V. Tsarev
author_facet Alexander A. Shklyaev
Andrei V. Tsarev
author_sort Alexander A. Shklyaev
collection DOAJ
description The solid-state dewetting phenomenon was used to obtain submicron- and micron-sized SiGe particle arrays by the Ge deposition on Si(100) substrates. Their transmission and reflection spectra were measured and numerically modeled by the FDTD method. They exhibit resonance effects in broad infrared spectral ranges, depending on the particle size. The broadband antireflection property is associated with wide particle size distributions and the influence of a high-index substrate. The results show that the dewetting phenomenon provides the natural formation of arrays of particles shaped as close to a sphere segment, and they turned out to be effective as antireflection coatings.
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spelling doaj.art-76dc78bbc50a4889a13bdf7bd884edfd2022-12-22T03:34:55ZengIEEEIEEE Photonics Journal1943-06552021-01-0113311210.1109/JPHOT.2021.30811009435026Broadband Antireflection Coatings Made of Resonant Submicron- and Micron-Sized SiGe Particles Grown on Si SubstratesAlexander A. Shklyaev0https://orcid.org/0000-0001-7271-3921Andrei V. Tsarev1https://orcid.org/0000-0002-6435-8330Novosibirsk State University, Novosibirsk, RussiaNovosibirsk State University, Novosibirsk, RussiaThe solid-state dewetting phenomenon was used to obtain submicron- and micron-sized SiGe particle arrays by the Ge deposition on Si(100) substrates. Their transmission and reflection spectra were measured and numerically modeled by the FDTD method. They exhibit resonance effects in broad infrared spectral ranges, depending on the particle size. The broadband antireflection property is associated with wide particle size distributions and the influence of a high-index substrate. The results show that the dewetting phenomenon provides the natural formation of arrays of particles shaped as close to a sphere segment, and they turned out to be effective as antireflection coatings.https://ieeexplore.ieee.org/document/9435026/Thin film coatingsoptical properties of photonic materialsmetamaterialsfabrication and characterizationnumerical simulationFDTD method
spellingShingle Alexander A. Shklyaev
Andrei V. Tsarev
Broadband Antireflection Coatings Made of Resonant Submicron- and Micron-Sized SiGe Particles Grown on Si Substrates
IEEE Photonics Journal
Thin film coatings
optical properties of photonic materials
metamaterials
fabrication and characterization
numerical simulation
FDTD method
title Broadband Antireflection Coatings Made of Resonant Submicron- and Micron-Sized SiGe Particles Grown on Si Substrates
title_full Broadband Antireflection Coatings Made of Resonant Submicron- and Micron-Sized SiGe Particles Grown on Si Substrates
title_fullStr Broadband Antireflection Coatings Made of Resonant Submicron- and Micron-Sized SiGe Particles Grown on Si Substrates
title_full_unstemmed Broadband Antireflection Coatings Made of Resonant Submicron- and Micron-Sized SiGe Particles Grown on Si Substrates
title_short Broadband Antireflection Coatings Made of Resonant Submicron- and Micron-Sized SiGe Particles Grown on Si Substrates
title_sort broadband antireflection coatings made of resonant submicron and micron sized sige particles grown on si substrates
topic Thin film coatings
optical properties of photonic materials
metamaterials
fabrication and characterization
numerical simulation
FDTD method
url https://ieeexplore.ieee.org/document/9435026/
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