Monolithic Single PMUT-on-CMOS Ultrasound System With +17 dB SNR for Imaging Applications
This article presents a fully integrated ultrasound system based on a single piezoelectric micromachined ultrasonic transducer (PMUT) monolithically fabricated with a 0.13 μm complementary metal oxide semiconductor (CMOS) process analog front-end circuitry. The PMUT consists of an aluminu...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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IEEE
2020-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9154376/ |
| _version_ | 1818430660216356864 |
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| author | Ivan Zamora Eyglis Ledesma Arantxa Uranga Nuria Barniol |
| author_facet | Ivan Zamora Eyglis Ledesma Arantxa Uranga Nuria Barniol |
| author_sort | Ivan Zamora |
| collection | DOAJ |
| description | This article presents a fully integrated ultrasound system based on a single piezoelectric micromachined ultrasonic transducer (PMUT) monolithically fabricated with a 0.13 μm complementary metal oxide semiconductor (CMOS) process analog front-end circuitry. The PMUT consists of an aluminum nitride, AlN, squared device with 80 μm side that resonates at 2.4 MHz in liquid environment. The monolithic integration of the PMUT with the CMOS circuitry allows a reduction of the parasitic capacitance, a reduction of the electronic noise contribution and a clear improvement in the Signal-to Noise ratio (SNR ~ 27 dB better) compared to a non-integrated equivalent system. A pulse-echo experiment with the single PMUTon-CMOS for transmitting and sensing simultaneously is demonstrated, ensuring a 17.3 dB SNR, higher than the minimal necessary for accurate fingerprint images, paving the way towards a pixel sized imaging system with no need of multiple simultaneous PMUTs transmitters. Consuming only 0.3 mW and getting an input-referred noise of 3.26 mPa/√Hz at 2.4 MHz, the proposed pulse-echo system achieves a competitive noise efficient factor in comparison with the state-of-the-art. |
| first_indexed | 2024-12-14T15:36:56Z |
| format | Article |
| id | doaj.art-76f964c4d48f4bf9b707599cdb66c0e1 |
| institution | Directory Open Access Journal |
| issn | 2169-3536 |
| language | English |
| last_indexed | 2024-12-14T15:36:56Z |
| publishDate | 2020-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Access |
| spelling | doaj.art-76f964c4d48f4bf9b707599cdb66c0e12022-12-21T22:55:43ZengIEEEIEEE Access2169-35362020-01-01814278514279410.1109/ACCESS.2020.30137639154376Monolithic Single PMUT-on-CMOS Ultrasound System With +17 dB SNR for Imaging ApplicationsIvan Zamora0https://orcid.org/0000-0003-3787-4708Eyglis Ledesma1https://orcid.org/0000-0002-6967-6565Arantxa Uranga2https://orcid.org/0000-0002-3593-4060Nuria Barniol3https://orcid.org/0000-0001-6325-2166Departament d’Enginyeria Electrònica, Universitat Autònoma de Barcelona, Bellaterra, SpainDepartament d’Enginyeria Electrònica, Universitat Autònoma de Barcelona, Bellaterra, SpainDepartament d’Enginyeria Electrònica, Universitat Autònoma de Barcelona, Bellaterra, SpainDepartament d’Enginyeria Electrònica, Universitat Autònoma de Barcelona, Bellaterra, SpainThis article presents a fully integrated ultrasound system based on a single piezoelectric micromachined ultrasonic transducer (PMUT) monolithically fabricated with a 0.13 μm complementary metal oxide semiconductor (CMOS) process analog front-end circuitry. The PMUT consists of an aluminum nitride, AlN, squared device with 80 μm side that resonates at 2.4 MHz in liquid environment. The monolithic integration of the PMUT with the CMOS circuitry allows a reduction of the parasitic capacitance, a reduction of the electronic noise contribution and a clear improvement in the Signal-to Noise ratio (SNR ~ 27 dB better) compared to a non-integrated equivalent system. A pulse-echo experiment with the single PMUTon-CMOS for transmitting and sensing simultaneously is demonstrated, ensuring a 17.3 dB SNR, higher than the minimal necessary for accurate fingerprint images, paving the way towards a pixel sized imaging system with no need of multiple simultaneous PMUTs transmitters. Consuming only 0.3 mW and getting an input-referred noise of 3.26 mPa/√Hz at 2.4 MHz, the proposed pulse-echo system achieves a competitive noise efficient factor in comparison with the state-of-the-art.https://ieeexplore.ieee.org/document/9154376/AlNCMOSCMOS-MEMSpiezoelectrical resonatorpiezoelectric on CMOSPMUT |
| spellingShingle | Ivan Zamora Eyglis Ledesma Arantxa Uranga Nuria Barniol Monolithic Single PMUT-on-CMOS Ultrasound System With +17 dB SNR for Imaging Applications IEEE Access AlN CMOS CMOS-MEMS piezoelectrical resonator piezoelectric on CMOS PMUT |
| title | Monolithic Single PMUT-on-CMOS Ultrasound System With +17 dB SNR for Imaging Applications |
| title_full | Monolithic Single PMUT-on-CMOS Ultrasound System With +17 dB SNR for Imaging Applications |
| title_fullStr | Monolithic Single PMUT-on-CMOS Ultrasound System With +17 dB SNR for Imaging Applications |
| title_full_unstemmed | Monolithic Single PMUT-on-CMOS Ultrasound System With +17 dB SNR for Imaging Applications |
| title_short | Monolithic Single PMUT-on-CMOS Ultrasound System With +17 dB SNR for Imaging Applications |
| title_sort | monolithic single pmut on cmos ultrasound system with x002b 17 db snr for imaging applications |
| topic | AlN CMOS CMOS-MEMS piezoelectrical resonator piezoelectric on CMOS PMUT |
| url | https://ieeexplore.ieee.org/document/9154376/ |
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