Monolithic Single PMUT-on-CMOS Ultrasound System With +17 dB SNR for Imaging Applications
This article presents a fully integrated ultrasound system based on a single piezoelectric micromachined ultrasonic transducer (PMUT) monolithically fabricated with a 0.13 μm complementary metal oxide semiconductor (CMOS) process analog front-end circuitry. The PMUT consists of an aluminu...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2020-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9154376/ |