Properties-Adjustable Alumina-Zirconia Nanolaminate Dielectric Fabricated by Spin-Coating

Properties-Adjustable Alumina-Zirconia Nanolaminate Dielectric Fabricated by Spin-Coating

In this paper, an alumina-zirconia (Al2O3-ZrO2) nanolaminate dielectric was fabricated by spin-coating and the performance was investigated. It was found that the properties of the dielectric can be adjusted by changing the content of Al2O3/ZrO2 in nanolaminates: when the content of Al2O3 was higher...

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Bibliographic Details
Main Authors:	Junbiao Peng, Jinglin Wei, Zhennan Zhu, Honglong Ning, Wei Cai, Kuankuan Lu, Rihui Yao, Hong Tao, Yanqiong Zheng, Xubing Lu
Format:	Article
Language:	English
Published:	MDPI AG 2017-11-01
Series:	Nanomaterials
Subjects:	properties-adjustable Al2O3-ZrO2 nanolaminate dielectric spin-coating
Online Access:	https://www.mdpi.com/2079-4991/7/12/419

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