A Micro-Hotplate-Based Oven-Controlled System Used to Improve the Frequency Stability of MEMS Resonators
This paper introduces a chip-level oven-controlled system for improving the temperature stability of MEMS resonators wherein we designed the resonator and the micro-hotplate using MEMS technology, then bounding them in a package shell at the chip level. The resonator is transduced by AlN film, and i...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-06-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/14/6/1222 |
| _version_ | 1827736359272448000 |
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| author | Tianren Feng Duli Yu Bo Wu Hui Wang |
| author_facet | Tianren Feng Duli Yu Bo Wu Hui Wang |
| author_sort | Tianren Feng |
| collection | DOAJ |
| description | This paper introduces a chip-level oven-controlled system for improving the temperature stability of MEMS resonators wherein we designed the resonator and the micro-hotplate using MEMS technology, then bounding them in a package shell at the chip level. The resonator is transduced by AlN film, and its temperature is monitored by temperature-sensing resistors on both sides. The designed micro-hotplate is placed at the bottom of the resonator chip as a heater and insulated by airgel. The PID pulse width modulation (PWM) circuit controls the heater according to the temperature detection result to provide a constant temperature for the resonator. The proposed oven-controlled MEMS resonator (OCMR) exhibits a frequency drift of 3.5 ppm. Compared with the previously reported similar methods, first, the OCMR structure using airgel combined with a micro-hotplate is proposed for the first time, and the working temperature is extended from 85 °C to 125 °C. Second, our work does not require redesign or additional constraints on the MEMS resonator, so the proposed structure is more general and can be practically applied to other MEMS devices that require temperature control. |
| first_indexed | 2024-03-11T02:09:18Z |
| format | Article |
| id | doaj.art-772148cc00f040b1a6930262bd26fad7 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-11T02:09:18Z |
| publishDate | 2023-06-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-772148cc00f040b1a6930262bd26fad72023-11-18T11:40:06ZengMDPI AGMicromachines2072-666X2023-06-01146122210.3390/mi14061222A Micro-Hotplate-Based Oven-Controlled System Used to Improve the Frequency Stability of MEMS ResonatorsTianren Feng0Duli Yu1Bo Wu2Hui Wang3College of Information Science and Technology, Beijing University of Chemical Technology, Beijing 100029, ChinaCollege of Information Science and Technology, Beijing University of Chemical Technology, Beijing 100029, ChinaGuangdong Institute of Semiconductor Micro-Nano Manufacturing Technology, Foshan 528000, ChinaGuangdong Institute of Semiconductor Micro-Nano Manufacturing Technology, Foshan 528000, ChinaThis paper introduces a chip-level oven-controlled system for improving the temperature stability of MEMS resonators wherein we designed the resonator and the micro-hotplate using MEMS technology, then bounding them in a package shell at the chip level. The resonator is transduced by AlN film, and its temperature is monitored by temperature-sensing resistors on both sides. The designed micro-hotplate is placed at the bottom of the resonator chip as a heater and insulated by airgel. The PID pulse width modulation (PWM) circuit controls the heater according to the temperature detection result to provide a constant temperature for the resonator. The proposed oven-controlled MEMS resonator (OCMR) exhibits a frequency drift of 3.5 ppm. Compared with the previously reported similar methods, first, the OCMR structure using airgel combined with a micro-hotplate is proposed for the first time, and the working temperature is extended from 85 °C to 125 °C. Second, our work does not require redesign or additional constraints on the MEMS resonator, so the proposed structure is more general and can be practically applied to other MEMS devices that require temperature control.https://www.mdpi.com/2072-666X/14/6/1222resonatorsOCMRhotplatetemperature controlMEMS devices |
| spellingShingle | Tianren Feng Duli Yu Bo Wu Hui Wang A Micro-Hotplate-Based Oven-Controlled System Used to Improve the Frequency Stability of MEMS Resonators Micromachines resonators OCMR hotplate temperature control MEMS devices |
| title | A Micro-Hotplate-Based Oven-Controlled System Used to Improve the Frequency Stability of MEMS Resonators |
| title_full | A Micro-Hotplate-Based Oven-Controlled System Used to Improve the Frequency Stability of MEMS Resonators |
| title_fullStr | A Micro-Hotplate-Based Oven-Controlled System Used to Improve the Frequency Stability of MEMS Resonators |
| title_full_unstemmed | A Micro-Hotplate-Based Oven-Controlled System Used to Improve the Frequency Stability of MEMS Resonators |
| title_short | A Micro-Hotplate-Based Oven-Controlled System Used to Improve the Frequency Stability of MEMS Resonators |
| title_sort | micro hotplate based oven controlled system used to improve the frequency stability of mems resonators |
| topic | resonators OCMR hotplate temperature control MEMS devices |
| url | https://www.mdpi.com/2072-666X/14/6/1222 |
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