Development of high energy and high flux argon ion gun
BackgroundLarge size aspherical mirrors have been widely used in space communication systems because of their high angular resolution and energy harvesting ability.PurposeThis study aims to develop a high energy and high flux argon (Ar) ion gun for the rapid polishing of modified silicon layer on...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | zho |
| Published: |
Science Press
2021-09-01
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| Series: | He jishu |
| Subjects: | |
| Online Access: | http://www.hjs.sinap.ac.cn/thesisDetails#10.11889/j.0253-3219.2021.hjs.44.090401&lang=zh |