Flexible MISFET Devices From Transfer Printed Si Microwires and Spray Coating

Flexible MISFET Devices From Transfer Printed Si Microwires and Spray Coating

This paper presents two types of metal insulator field effect transistors (MISFETs) devices fabricated from Si microwires through a new manufacturing route involving a combination of printing and microfabrication technologies. Si microwires, developed through standard photolithography and etching st...

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Bibliographic Details
Main Authors: Saleem Khan, Leandro Lorenzelli, Ravinder Dahiya
Format: Article
Language:English
Published: IEEE 2016-01-01
Series:IEEE Journal of the Electron Devices Society
Subjects:
Microwires
silicon
spray coating
transfer printing
Online Access:https://ieeexplore.ieee.org/document/7464263/

Internet

https://ieeexplore.ieee.org/document/7464263/

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