Generative Adversarial Network-Based Fault Detection in Semiconductor Equipment with Class-Imbalanced Data

Generative Adversarial Network-Based Fault Detection in Semiconductor Equipment with Class-Imbalanced Data

This research proposes an application of generative adversarial networks (GANs) to solve the class imbalance problem in the fault detection and classification study of a plasma etching process. Small changes in the equipment part condition of the plasma equipment may cause an equipment fault, result...

Full description

Bibliographic Details
Main Authors:	Jeong Eun Choi, Da Hoon Seol, Chan Young Kim, Sang Jeen Hong
Format:	Article
Language:	English
Published:	MDPI AG 2023-02-01
Series:	Sensors
Subjects:	fault detection generative adversarial networks machine learning optical emission spectroscopy plasma etch
Online Access:	https://www.mdpi.com/1424-8220/23/4/1889

Similar Items

Use of Optical Emission Spectroscopy Data for Fault Detection of Mass Flow Controller in Plasma Etch Equipment
by: Hyukjoon Kwon, et al.
Published: (2022-01-01)

Imbalanced Fault Diagnosis of Rolling Bearing Based on Generative Adversarial Network: A Comparative Study
by: Wentao Mao, et al.
Published: (2019-01-01)

Data Fusion Generative Adversarial Network for Multi-Class Imbalanced Fault Diagnosis of Rotating Machinery
by: Qianjun Liu, et al.
Published: (2020-01-01)

An Imbalanced Fault Diagnosis Method for Rolling Bearing Based on Semi-Supervised Conditional Generative Adversarial Network With Spectral Normalization
by: Minqiu Xu, et al.
Published: (2021-01-01)

Studies of the chemistry of plasmas used for semiconductor etching
by: Toogood, M, et al.
Published: (1991)

Fault Diagnosis Method for Imbalanced Data Based on Multi-Signal Fusion and Improved Deep Convolution Generative Adversarial Network
by: Congying Deng, et al.
Published: (2023-02-01)

Artificial Immune System for Fault Detection and Classification of Semiconductor Equipment
by: Hyoeun Park, et al.
Published: (2021-04-01)

Imbalanced Fault Diagnosis of Rolling Bearing Using Data Synthesis Based on Multi-Resolution Fusion Generative Adversarial Networks
by: Chuanzhu Hao, et al.
Published: (2022-04-01)

Plasma etching in semiconductor fabrication /
by: 217469 Morgan, Russ A.
Published: (1985)

Plasma processes for semiconductor fabrication /
by: 414824 Hitchon, W. Nicholas G.
Published: (1999)

Generalization of Deep Neural Networks for Imbalanced Fault Classification of Machinery Using Generative Adversarial Networks
by: Jinrui Wang, et al.
Published: (2019-01-01)

Alleviating Class-Imbalance Data of Semiconductor Equipment Anomaly Detection Study
by: Da Hoon Seol, et al.
Published: (2023-01-01)

Bearing Fault Diagnosis Method Based on Adversarial Transfer Learning for Imbalanced Samples of Portal Crane Drive Motor
by: Yongsheng Yang, et al.
Published: (2023-12-01)

Fault Diagnosis of Induction Motors with Imbalanced Data Using Deep Convolutional Generative Adversarial Network
by: Hong-Chan Chang, et al.
Published: (2022-04-01)

Two-Stage Multi-Scale Fault Diagnosis Method for Rolling Bearings with Imbalanced Data
by: Minglei Zheng, et al.
Published: (2022-05-01)

Intelligent fault diagnosis of mine ventilation system for imbalanced data sets
by: Dan ZHAO, et al.
Published: (2023-10-01)

Generative Oversampling Method for Imbalanced Data on Bearing Fault Detection and Diagnosis
by: Sungho Suh, et al.
Published: (2019-02-01)

An Endpoint Detection System for Ion Beam Etching Using Optical Emission Spectroscopy
by: Junjie Zhang, et al.
Published: (2022-02-01)

Imbalanced sample fault diagnosis method for rotating machinery in nuclear power plants based on deep convolutional conditional generative adversarial network
by: Zhichao Wang, et al.
Published: (2023-06-01)

A Threshold-Control Generative Adversarial Network Method for Intelligent Fault Diagnosis
by: Xinyu Li, et al.
Published: (2021-03-01)

Factor Design for the Oxide Etching Process to Reduce Edge Particle Contamination in Capacitively Coupled Plasma Etching Equipment
by: Ching-Ming Ku, et al.
Published: (2022-06-01)

Dynamic Condition Adversarial Adaptation for Fault Diagnosis of Wind Turbine Gearbox
by: Hongpeng Zhang, et al.
Published: (2023-11-01)

Domain Adaptation Network with Double Adversarial Mechanism for Intelligent Fault Diagnosis
by: Kun Xu, et al.
Published: (2021-08-01)

Data Augmentation Using Generative Adversarial Network for Automatic Machine Fault Detection Based on Vibration Signals
by: Van Bui, et al.
Published: (2021-03-01)

Studies on etching and polymer deposition in halocarbon plasmas
by: Astell-Burt, P, et al.
Published: (1987)

Imbalanced Bearing Fault Diagnosis Based on RFH-GAN and PSA-DRSN
by: Zhidan Zhong, et al.
Published: (2023-01-01)

Fault Detection and Diagnosis with Imbalanced and Noisy Data: A Hybrid Framework for Rotating Machinery
by: Masoud Jalayer, et al.
Published: (2022-03-01)

Dual Autoencoders Generative Adversarial Network for Imbalanced Classification Problem
by: Ensen Wu, et al.
Published: (2020-01-01)

A Semi-Supervised Fault Diagnosis Method Based on Improved Bidirectional Generative Adversarial Network
by: Long Cui, et al.
Published: (2021-10-01)

Intelligent Fault Diagnosis of Broken Wires for Steel Wire Ropes Based on Generative Adversarial Nets
by: Yiqing Zhang, et al.
Published: (2022-11-01)

Model and Training Method of the Resilient Image Classifier Considering Faults, Concept Drift, and Adversarial Attacks
by: Viacheslav Moskalenko, et al.
Published: (2022-10-01)

Improved Conditional Domain Adversarial Networks for Intelligent Transfer Fault Diagnosis
by: Haihua Qin, et al.
Published: (2024-02-01)

Unsupervised Method Based on Adversarial Domain Adaptation for Bearing Fault Diagnosis
by: Yao Li, et al.
Published: (2023-06-01)

Plankton Detection with Adversarial Learning and a Densely Connected Deep Learning Model for Class Imbalanced Distribution
by: Yan Li, et al.
Published: (2021-06-01)

Generative Adversarial Network-Based Scheme for Diagnosing Faults in Cyber-Physical Power Systems
by: Hossein Hassani, et al.
Published: (2021-07-01)

Exploiting Generative Adversarial Networks as an Oversampling Method for Fault Diagnosis of an Industrial Robotic Manipulator
by: Ziqiang Pu, et al.
Published: (2020-10-01)

Machine Learning Approaches for Fault Detection in Semiconductor Manufacturing Process: A Critical Review of Recent Applications and Future Perspectives
by: V. Arpitha, et al.
Published: (2022-04-01)

Adversarial Deep Transfer Learning in Fault Diagnosis: Progress, Challenges, and Future Prospects
by: Yu Guo, et al.
Published: (2023-08-01)

An Intelligent Fault Diagnosis for Rolling Bearing Based on Adversarial Semi-Supervised Method
by: Yongchao Zhang, et al.
Published: (2020-01-01)

Contribution of Ion Energy and Flux on High-Aspect Ratio SiO<sub>2</sub> Etching Characteristics in a Dual-Frequency Capacitively Coupled Ar/C<sub>4</sub>F<sub>8</sub> Plasma: Individual Ion Energy and Flux Controlled
by: Wonnyoung Jeong, et al.
Published: (2023-05-01)