Thin-film SnO<sub>2</sub> and ZnO detectors of hydrogen peroxide vapors

Thin-film SnO<sub>2</sub> and ZnO detectors of hydrogen peroxide vapors

Thin-film hydrogen peroxide vapor sensors made from Co-doped SnO<sub>2</sub> and La-doped ZnO were manufactured using the high-frequency magnetron sputtering method. Thicknesses of deposited doped metal oxide films were measured and their morphology was investigated. The gas sensing c...

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Bibliographic Details
Main Authors:	V. Aroutiounian, V. Arakelyan, M. Aleksanyan, G. Shahnazaryan, P. Kacer, P. Picha, J. Kovarik, J. Pekarek, B. Joost
Format:	Article
Language:	English
Published:	Copernicus Publications 2018-04-01
Series:	Journal of Sensors and Sensor Systems
Online Access:	https://www.j-sens-sens-syst.net/7/281/2018/jsss-7-281-2018.pdf

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