A Mini-System Integrated with Metal-Oxide-Semiconductor Sensor and Micro-Packed Gas Chromatographic Column
In this work, a mini monitoring system integrated with a microfabricated metal oxide array sensor and a micro packed gas chromatographic (GC) column was developed for monitoring environmental gases. The microfabricated packed GC column with a 1.6 m length was used to separate the environmental gas,...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-08-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/9/8/408 |
| _version_ | 1819090032735027200 |
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| author | Jianhai Sun Zhaoxin Geng Ning Xue Chunxiu Liu Tianjun Ma |
| author_facet | Jianhai Sun Zhaoxin Geng Ning Xue Chunxiu Liu Tianjun Ma |
| author_sort | Jianhai Sun |
| collection | DOAJ |
| description | In this work, a mini monitoring system integrated with a microfabricated metal oxide array sensor and a micro packed gas chromatographic (GC) column was developed for monitoring environmental gases. The microfabricated packed GC column with a 1.6 m length was used to separate the environmental gas, and the metal oxide semiconductor (MOS) array sensor, fabricated with nano-sized SnO-SnO2 sensitive materials, was able to effectively detect each component separated by GC column. The results demonstrate that the monitoring system can detect environmental gas with high precision. |
| first_indexed | 2024-12-21T22:17:23Z |
| format | Article |
| id | doaj.art-78c519b4d960418f8cb3762cf394d95e |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-12-21T22:17:23Z |
| publishDate | 2018-08-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-78c519b4d960418f8cb3762cf394d95e2022-12-21T18:48:25ZengMDPI AGMicromachines2072-666X2018-08-019840810.3390/mi9080408mi9080408A Mini-System Integrated with Metal-Oxide-Semiconductor Sensor and Micro-Packed Gas Chromatographic ColumnJianhai Sun0Zhaoxin Geng1Ning Xue2Chunxiu Liu3Tianjun Ma4State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, ChinaSchool of Science, Minzu University of China, Beijing 100081, ChinaState Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, ChinaState Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, ChinaState Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, ChinaIn this work, a mini monitoring system integrated with a microfabricated metal oxide array sensor and a micro packed gas chromatographic (GC) column was developed for monitoring environmental gases. The microfabricated packed GC column with a 1.6 m length was used to separate the environmental gas, and the metal oxide semiconductor (MOS) array sensor, fabricated with nano-sized SnO-SnO2 sensitive materials, was able to effectively detect each component separated by GC column. The results demonstrate that the monitoring system can detect environmental gas with high precision.http://www.mdpi.com/2072-666X/9/8/408packed gas chromatographic columnmetal-oxide-semiconductor array sensorsensitive materialenvironmental monitoring |
| spellingShingle | Jianhai Sun Zhaoxin Geng Ning Xue Chunxiu Liu Tianjun Ma A Mini-System Integrated with Metal-Oxide-Semiconductor Sensor and Micro-Packed Gas Chromatographic Column Micromachines packed gas chromatographic column metal-oxide-semiconductor array sensor sensitive material environmental monitoring |
| title | A Mini-System Integrated with Metal-Oxide-Semiconductor Sensor and Micro-Packed Gas Chromatographic Column |
| title_full | A Mini-System Integrated with Metal-Oxide-Semiconductor Sensor and Micro-Packed Gas Chromatographic Column |
| title_fullStr | A Mini-System Integrated with Metal-Oxide-Semiconductor Sensor and Micro-Packed Gas Chromatographic Column |
| title_full_unstemmed | A Mini-System Integrated with Metal-Oxide-Semiconductor Sensor and Micro-Packed Gas Chromatographic Column |
| title_short | A Mini-System Integrated with Metal-Oxide-Semiconductor Sensor and Micro-Packed Gas Chromatographic Column |
| title_sort | mini system integrated with metal oxide semiconductor sensor and micro packed gas chromatographic column |
| topic | packed gas chromatographic column metal-oxide-semiconductor array sensor sensitive material environmental monitoring |
| url | http://www.mdpi.com/2072-666X/9/8/408 |
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