Preparation of wide optical spectrum and high antireflection MgF2 thin film with SF6 as reactive gas
In order to suppress F-deficiency, SF _6 was added into the working gas Ar _2 as the reaction gas to deposit MgF _2 thin film on quartz glass substrate with radio frequency (RF) magnetron sputtering, and the effects of working pressure on the chemical compositions, microstructure and property of MgF...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2020-01-01
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| Series: | Materials Research Express |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2053-1591/ab7402 |