Laser Pyrolysis of Imprinted Furan Pattern for the Precise Fabrication of Microsupercapacitor Electrodes
The design or dimension of micro-supercapacitor electrodes is an important factor that determines their performance. In this study, a microsupercapacitor was precisely fabricated on a silicon substrate by irradiating an imprinted furan micropattern with a CO<sub>2</sub> laser beam under...
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| Format: | Article |
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MDPI AG
2020-07-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/11/8/746 |
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| author | Jina Jang Jeong Woo Yeom Won Kyu Kang Muhammad Refatul Haq Xun Lu Dongjun Shin Seok-Min Kim Jung Bin In |
| author_facet | Jina Jang Jeong Woo Yeom Won Kyu Kang Muhammad Refatul Haq Xun Lu Dongjun Shin Seok-Min Kim Jung Bin In |
| author_sort | Jina Jang |
| collection | DOAJ |
| description | The design or dimension of micro-supercapacitor electrodes is an important factor that determines their performance. In this study, a microsupercapacitor was precisely fabricated on a silicon substrate by irradiating an imprinted furan micropattern with a CO<sub>2</sub> laser beam under ambient conditions. Since furan is a carbon-abundant polymer, electrically conductive and porous carbon structures were produced by laser-induced pyrolysis. While the pyrolysis of a furan film in a general electric furnace resulted in severe cracks and delamination, the laser pyrolysis method proposed herein yielded porous carbon films without cracks or delamination. Moreover, as the imprinting process already designated the furan area for laser pyrolysis, high-precision patterning was achieved in the subsequent laser pyrolysis step. This two-step process exploited the superior resolution of imprinting for the fabrication of a laser-pyrolyzed carbon micropattern. As a result, the technical limitations of conventional laser direct writing could be overcome. The laser-pyrolyzed carbon structure was employed for microsupercapacitor electrodes. The microsupercapacitor showed a specific capacitance of 0.92 mF/cm<sup>2</sup> at 1 mA/cm<sup>2</sup> with a PVA-H<sub>2</sub>SO<sub>4</sub> gel electrolyte, and retained an up to 88% capacitance after 10,000 charging/discharging cycles. |
| first_indexed | 2024-03-10T18:05:15Z |
| format | Article |
| id | doaj.art-795cd5c192ec41429b864ad941d8e8bb |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T18:05:15Z |
| publishDate | 2020-07-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-795cd5c192ec41429b864ad941d8e8bb2023-11-20T08:34:26ZengMDPI AGMicromachines2072-666X2020-07-0111874610.3390/mi11080746Laser Pyrolysis of Imprinted Furan Pattern for the Precise Fabrication of Microsupercapacitor ElectrodesJina Jang0Jeong Woo Yeom1Won Kyu Kang2Muhammad Refatul Haq3Xun Lu4Dongjun Shin5Seok-Min Kim6Jung Bin In7Department of Mechanical Engineering, Chung-Ang University, 84 Heukseok-ro, Dongjak-gu, Seoul 06974, KoreaDepartment of Mechanical Engineering, Chung-Ang University, 84 Heukseok-ro, Dongjak-gu, Seoul 06974, KoreaDepartment of Mechanical Engineering, Chung-Ang University, 84 Heukseok-ro, Dongjak-gu, Seoul 06974, KoreaDepartment of Mechanical Engineering, Chung-Ang University, 84 Heukseok-ro, Dongjak-gu, Seoul 06974, KoreaDepartment of Mechanical Engineering, Yanbian University, Yanji 133002, ChinaDepartment of Mechanical Engineering, Chung-Ang University, 84 Heukseok-ro, Dongjak-gu, Seoul 06974, KoreaDepartment of Mechanical Engineering, Chung-Ang University, 84 Heukseok-ro, Dongjak-gu, Seoul 06974, KoreaDepartment of Mechanical Engineering, Chung-Ang University, 84 Heukseok-ro, Dongjak-gu, Seoul 06974, KoreaThe design or dimension of micro-supercapacitor electrodes is an important factor that determines their performance. In this study, a microsupercapacitor was precisely fabricated on a silicon substrate by irradiating an imprinted furan micropattern with a CO<sub>2</sub> laser beam under ambient conditions. Since furan is a carbon-abundant polymer, electrically conductive and porous carbon structures were produced by laser-induced pyrolysis. While the pyrolysis of a furan film in a general electric furnace resulted in severe cracks and delamination, the laser pyrolysis method proposed herein yielded porous carbon films without cracks or delamination. Moreover, as the imprinting process already designated the furan area for laser pyrolysis, high-precision patterning was achieved in the subsequent laser pyrolysis step. This two-step process exploited the superior resolution of imprinting for the fabrication of a laser-pyrolyzed carbon micropattern. As a result, the technical limitations of conventional laser direct writing could be overcome. The laser-pyrolyzed carbon structure was employed for microsupercapacitor electrodes. The microsupercapacitor showed a specific capacitance of 0.92 mF/cm<sup>2</sup> at 1 mA/cm<sup>2</sup> with a PVA-H<sub>2</sub>SO<sub>4</sub> gel electrolyte, and retained an up to 88% capacitance after 10,000 charging/discharging cycles.https://www.mdpi.com/2072-666X/11/8/746laser pyrolysisimprintingfuranmicropatternmicrosupercapacitor |
| spellingShingle | Jina Jang Jeong Woo Yeom Won Kyu Kang Muhammad Refatul Haq Xun Lu Dongjun Shin Seok-Min Kim Jung Bin In Laser Pyrolysis of Imprinted Furan Pattern for the Precise Fabrication of Microsupercapacitor Electrodes Micromachines laser pyrolysis imprinting furan micropattern microsupercapacitor |
| title | Laser Pyrolysis of Imprinted Furan Pattern for the Precise Fabrication of Microsupercapacitor Electrodes |
| title_full | Laser Pyrolysis of Imprinted Furan Pattern for the Precise Fabrication of Microsupercapacitor Electrodes |
| title_fullStr | Laser Pyrolysis of Imprinted Furan Pattern for the Precise Fabrication of Microsupercapacitor Electrodes |
| title_full_unstemmed | Laser Pyrolysis of Imprinted Furan Pattern for the Precise Fabrication of Microsupercapacitor Electrodes |
| title_short | Laser Pyrolysis of Imprinted Furan Pattern for the Precise Fabrication of Microsupercapacitor Electrodes |
| title_sort | laser pyrolysis of imprinted furan pattern for the precise fabrication of microsupercapacitor electrodes |
| topic | laser pyrolysis imprinting furan micropattern microsupercapacitor |
| url | https://www.mdpi.com/2072-666X/11/8/746 |
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