Laser Pyrolysis of Imprinted Furan Pattern for the Precise Fabrication of Microsupercapacitor Electrodes

Laser Pyrolysis of Imprinted Furan Pattern for the Precise Fabrication of Microsupercapacitor Electrodes

The design or dimension of micro-supercapacitor electrodes is an important factor that determines their performance. In this study, a microsupercapacitor was precisely fabricated on a silicon substrate by irradiating an imprinted furan micropattern with a CO<sub>2</sub> laser beam under...

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Bibliographic Details
Main Authors: Jina Jang, Jeong Woo Yeom, Won Kyu Kang, Muhammad Refatul Haq, Xun Lu, Dongjun Shin, Seok-Min Kim, Jung Bin In
Format: Article
Language:English
Published: MDPI AG 2020-07-01
Series:Micromachines
Subjects:
laser pyrolysis
imprinting
furan
micropattern
microsupercapacitor
Online Access:https://www.mdpi.com/2072-666X/11/8/746

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