Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on Chip
The study presents a micro carbon monoxide (CO) sensor integrated with a readout circuit-on-a-chip manufactured by the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and a post-process. The sensing film of the sensor is a composite cobalt oxide nanosheet and carbon nanotub...
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| Format: | Article |
| Language: | English |
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MDPI AG
2010-03-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/10/3/1753/ |
| _version_ | 1798038660557307904 |
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| author | Ching-Liang Dai Yen-Chi Chen Chyan-Chyi Wu Chin-Fu Kuo |
| author_facet | Ching-Liang Dai Yen-Chi Chen Chyan-Chyi Wu Chin-Fu Kuo |
| author_sort | Ching-Liang Dai |
| collection | DOAJ |
| description | The study presents a micro carbon monoxide (CO) sensor integrated with a readout circuit-on-a-chip manufactured by the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and a post-process. The sensing film of the sensor is a composite cobalt oxide nanosheet and carbon nanotube (CoOOH/CNT) film that is prepared by a precipitation-oxidation method. The structure of the CO sensor is composed of a polysilicon resistor and a sensing film. The sensor, which is of a resistive type, changes its resistance when the sensing film adsorbs or desorbs CO gas. The readout circuit is used to convert the sensor resistance into the voltage output. The post-processing of the sensor includes etching the sacrificial layers and coating the sensing film. The advantages of the sensor include room temperature operation, short response/recovery times and easy post-processing. Experimental results show that the sensitivity of the CO sensor is about 0.19 mV/ppm, and the response and recovery times are 23 s and 34 s for 200 ppm CO, respectively. |
| first_indexed | 2024-04-11T21:43:07Z |
| format | Article |
| id | doaj.art-7998129145994e27a54935a20f760f70 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T21:43:07Z |
| publishDate | 2010-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-7998129145994e27a54935a20f760f702022-12-22T04:01:30ZengMDPI AGSensors1424-82202010-03-011031753176410.3390/s100301753Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on ChipChing-Liang DaiYen-Chi ChenChyan-Chyi WuChin-Fu KuoThe study presents a micro carbon monoxide (CO) sensor integrated with a readout circuit-on-a-chip manufactured by the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and a post-process. The sensing film of the sensor is a composite cobalt oxide nanosheet and carbon nanotube (CoOOH/CNT) film that is prepared by a precipitation-oxidation method. The structure of the CO sensor is composed of a polysilicon resistor and a sensing film. The sensor, which is of a resistive type, changes its resistance when the sensing film adsorbs or desorbs CO gas. The readout circuit is used to convert the sensor resistance into the voltage output. The post-processing of the sensor includes etching the sacrificial layers and coating the sensing film. The advantages of the sensor include room temperature operation, short response/recovery times and easy post-processing. Experimental results show that the sensitivity of the CO sensor is about 0.19 mV/ppm, and the response and recovery times are 23 s and 34 s for 200 ppm CO, respectively.http://www.mdpi.com/1424-8220/10/3/1753/micro carbon monoxide sensorcobalt oxide filmreadout circuit |
| spellingShingle | Ching-Liang Dai Yen-Chi Chen Chyan-Chyi Wu Chin-Fu Kuo Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on Chip Sensors micro carbon monoxide sensor cobalt oxide film readout circuit |
| title | Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on Chip |
| title_full | Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on Chip |
| title_fullStr | Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on Chip |
| title_full_unstemmed | Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on Chip |
| title_short | Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on Chip |
| title_sort | cobalt oxide nanosheet and cnt micro carbon monoxide sensor integrated with readout circuit on chip |
| topic | micro carbon monoxide sensor cobalt oxide film readout circuit |
| url | http://www.mdpi.com/1424-8220/10/3/1753/ |
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