Electroforming Processing for Nano/Micro Fabrication
Electroforming is a highly specialized electrodeposition process for the manufacture of metal components. Based on a bottom-up approach, the process can accurately replicate the shape of a model, known in the industry as a mandrel. Taking advantage of this process, it has long been used for the repr...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
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The Mining and Materials Processing Institute of Japan
2024-01-01
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| Series: | Journal of MMIJ |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/journalofmmij/140/1/140_1/_pdf/-char/en |
| _version_ | 1797324201219063808 |
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| author | Takayo YAMAMOTO Tomio NAGAYAMA |
| author_facet | Takayo YAMAMOTO Tomio NAGAYAMA |
| author_sort | Takayo YAMAMOTO |
| collection | DOAJ |
| description | Electroforming is a highly specialized electrodeposition process for the manufacture of metal components. Based on a bottom-up approach, the process can accurately replicate the shape of a model, known in the industry as a mandrel. Taking advantage of this process, it has long been used for the reproduction of metal crafts. With the progress of semiconductor processing technology, it has become possible to manufacture mandrels with complex shapes in the nano- and micro-scales. As a result, metal structures with fine shapes can be obtained by electroforming using these advanced mandrels. This development trend has led to the emergence of various MEMS devices. To further improve the functionality of the device, it is necessary to develop a new electroforming process using metals with properties superior to those of conventional electroforming using copper or nickel. This article reviews the historical development of electroforming and MEMS, and also introduces several newly developed electroforming processes that demonstrate high functionality. |
| first_indexed | 2024-03-08T05:46:42Z |
| format | Article |
| id | doaj.art-79d0870c8bc845f4a648509501f771e6 |
| institution | Directory Open Access Journal |
| issn | 1881-6118 1884-0450 |
| language | English |
| last_indexed | 2024-03-08T05:46:42Z |
| publishDate | 2024-01-01 |
| publisher | The Mining and Materials Processing Institute of Japan |
| record_format | Article |
| series | Journal of MMIJ |
| spelling | doaj.art-79d0870c8bc845f4a648509501f771e62024-02-05T08:55:12ZengThe Mining and Materials Processing Institute of JapanJournal of MMIJ1881-61181884-04502024-01-0114011710.2473/journalofmmij.140.1journalofmmijElectroforming Processing for Nano/Micro FabricationTakayo YAMAMOTO0Tomio NAGAYAMA1Kyoto Municipal Institute of Industrial Technology and CultureKyoto Municipal Institute of Industrial Technology and CultureElectroforming is a highly specialized electrodeposition process for the manufacture of metal components. Based on a bottom-up approach, the process can accurately replicate the shape of a model, known in the industry as a mandrel. Taking advantage of this process, it has long been used for the reproduction of metal crafts. With the progress of semiconductor processing technology, it has become possible to manufacture mandrels with complex shapes in the nano- and micro-scales. As a result, metal structures with fine shapes can be obtained by electroforming using these advanced mandrels. This development trend has led to the emergence of various MEMS devices. To further improve the functionality of the device, it is necessary to develop a new electroforming process using metals with properties superior to those of conventional electroforming using copper or nickel. This article reviews the historical development of electroforming and MEMS, and also introduces several newly developed electroforming processes that demonstrate high functionality.https://www.jstage.jst.go.jp/article/journalofmmij/140/1/140_1/_pdf/-char/enelectroformingnano/micro fabricationsmemsfe-ni alloy |
| spellingShingle | Takayo YAMAMOTO Tomio NAGAYAMA Electroforming Processing for Nano/Micro Fabrication Journal of MMIJ electroforming nano/micro fabrications mems fe-ni alloy |
| title | Electroforming Processing for Nano/Micro Fabrication |
| title_full | Electroforming Processing for Nano/Micro Fabrication |
| title_fullStr | Electroforming Processing for Nano/Micro Fabrication |
| title_full_unstemmed | Electroforming Processing for Nano/Micro Fabrication |
| title_short | Electroforming Processing for Nano/Micro Fabrication |
| title_sort | electroforming processing for nano micro fabrication |
| topic | electroforming nano/micro fabrications mems fe-ni alloy |
| url | https://www.jstage.jst.go.jp/article/journalofmmij/140/1/140_1/_pdf/-char/en |
| work_keys_str_mv | AT takayoyamamoto electroformingprocessingfornanomicrofabrication AT tomionagayama electroformingprocessingfornanomicrofabrication |