Fabrication and characterization of anatase/rutile–TiO2 thin films by magnetron sputtering: a review
This review article summarizes briefly some important achievements of our recent reserach on anatase and/or rutile TiO2 thin films, fabricated by helicon RF magnetron sputtering, with good crystal quality and high density, and gives the-state-of-the-art of the knowledge on systematic interrelationsh...
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| Format: | Article |
| Language: | English |
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Taylor & Francis Group
2005-01-01
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| Series: | Science and Technology of Advanced Materials |
| Online Access: | http://www.iop.org/EJ/abstract/-search=58668115.32/1468-6996/6/1/A03 |
| Summary: | This review article summarizes briefly some important achievements of our recent reserach on anatase and/or rutile TiO2 thin films, fabricated by helicon RF magnetron sputtering, with good crystal quality and high density, and gives the-state-of-the-art of the knowledge on systematic interrelationship for fabrication conditions, crystal structure, composition, optical properties, and bactericidal abilities, and on the effective surface treatment to improve the optical reactivity of the obtained films. |
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| ISSN: | 1468-6996 1878-5514 |