Reviews on Corrugated Diaphragms in Miniature Fiber-Optic Pressure Sensors

Reviews on Corrugated Diaphragms in Miniature Fiber-Optic Pressure Sensors

Corrugated diaphragms (CDs) have been widely used in many fields because of their higher pressure sensitivity and wider linear range compared to flat diaphragms (FDs) in the same circumstances. Especially in the application of miniature fiber-optic pressure sensors, the introduction of the corrugate...

Full description

Bibliographic Details
Main Authors:	Honglin Li, Hui Deng, Guangqi Zheng, Mingguang Shan, Zhi Zhong, Bin Liu
Format:	Article
Language:	English
Published:	MDPI AG 2019-05-01
Series:	Applied Sciences
Subjects:	corrugated diaphragm fiber-optic Fabry-Perot pressure sensor acoustic sensor MEMS
Online Access:	https://www.mdpi.com/2076-3417/9/11/2241

Similar Items

THE EFFECT OF MESA DIMENSIONS ON MEMS DIAPHRAGMS FOR FABRY-PEROT INTERFEROMETER-BASED FIBER OPTIC SENSORS
by: Ahmet Durmaz, et al.
Published: (2023-04-01)

A Novel High Sensitivity MEMS Acoustic Sensor using Corrugated Diaphragm
by: Bahram Azizollah Ganji, et al.
Published: (2024-02-01)

A Compact Optical MEMS Pressure Sensor Based on Fabry–Pérot Interference
by: Yonghong Qi, et al.
Published: (2022-03-01)

A Miniature Fiber Optic Refractive Index Sensor Built in a MEMS-Based Microchannel
by: Xingwei Wang, et al.
Published: (2011-01-01)

High Sensitivity and High Stability Dual Fabry-Perot Interferometric Fiber-Optic Acoustic Sensor Based on Sandwich-Structure Composite Diaphragm
by: Wanjin Zhang, et al.
Published: (2021-01-01)

Recent Progress in MEMS Fiber-Optic Fabry–Perot Pressure Sensors
by: Ye Chen, et al.
Published: (2024-02-01)

Acoustic Optical Fiber Sensor Based on Graphene Oxide Membrane
by: Catarina S. Monteiro, et al.
Published: (2021-03-01)

Fabry-Perot Interferometer Based on an Aluminum-Polyimide Composite Diaphragm Integrated With Mass for Acceleration Sensing
by: Shili Li, et al.
Published: (2019-01-01)

A Compact Fiber Optic Fabry–Perot Sensor for Simultaneous Measurement of Acoustic and Temperature
by: Xiaoying Liu, et al.
Published: (2019-01-01)

Implementation of the CMOS MEMS Condenser Microphone with Corrugated Metal Diaphragm and Silicon Back-Plate
by: Ming-Chuen Yip, et al.
Published: (2011-06-01)

An Acoustic Sensor Based on Active Fiber Fabry–Pérot Microcavities
by: Xin-Xia Gao, et al.
Published: (2020-10-01)

High-Consistency Optical Fiber Fabry–Perot Pressure Sensor Based on Silicon MEMS Technology for High Temperature Environment
by: Fei Feng, et al.
Published: (2021-05-01)

Miniature Twist/Rotation Fabry Perot Sensor Based on a Four-Core Fiber
by: Vedran Budinski, et al.
Published: (2018-12-01)

A Large-Area and Nanoscale Graphene Oxide Diaphragm-Based Extrinsic Fiber-Optic Fabry–Perot Acoustic Sensor Applied for Partial Discharge Detection in Air
by: Shuchao Wang, et al.
Published: (2020-11-01)

Fiber Optic Impact Location System Based on a Tracking Tandem Low-Coherence Interferometer
by: Petr Volkov, et al.
Published: (2023-01-01)

High-Performance Extrinsic Fabry-Perot Fiber Optic Acoustic Sensor Based on Au/PI Composite Film
by: Zekun Zhu, et al.
Published: (2024-01-01)

Evaluating a Human Ear-Inspired Sound Pressure Amplification Structure with Fabry–Perot Acoustic Sensor Using Graphene Diaphragm
by: Cheng Li, et al.
Published: (2021-09-01)

Comparison of Measurements with Finite-Element Analysis of Silicon-Diaphragm-Based Fiber-Optic Fabry–Perot Temperature Sensors
by: Rongkun Wang, et al.
Published: (2019-11-01)

Diaphragm-Free Fiber-Optic Fabry-Perot Interferometric Gas Pressure Sensor for High Temperature Application
by: Hao Liang, et al.
Published: (2018-03-01)

Miniature Diamond-Based Fiber Optic Pressure Sensor with Dual Polymer-Ceramic Adhesives
by: Hyungdae Bae, et al.
Published: (2019-05-01)

An optical fiber Fabry-Perot interferometric sensor based on functionalized diaphragm for ultrasound detection and imaging
by: Wenlu Zhang, et al.
Published: (2017-01-01)

Fiber Lateral Pressure Sensor Based on Vernier– Effect Improved Fabry–Perot Interferometer
by: Xu Guo, et al.
Published: (2022-10-01)

A Miniature Fabry Perot Sensor for Twist/Rotation, Strain and Temperature Measurements Based on a Four-Core Fiber
by: Vedran Budinski, et al.
Published: (2019-04-01)

Miniaturized Interferometric Sensors with Spectral Tunability for Optical Fiber Technology—A Comparison of Size Requirements, Performance, and New Concepts
by: Hartmut Hillmer, et al.
Published: (2021-08-01)

Feedback Stabilized Optical Fabry–Pérot Interferometer Based on Twin-Core Fiber for Multidimension Microdisplacement Sensing
by: Chuanbiao Zhang, et al.
Published: (2017-01-01)

Fiber fabry-pero micro pressure sensor
by: Yang Xiaojing, et al.
Published: (2017-01-01)

SNR Model of Optical Fiber Acoustic Sensing System Based on F-P Structure
by: Yingjie Liu, et al.
Published: (2023-06-01)

Miniature on-fiber extrinsic Fabry-Perot interferometric vibration sensors based on micro-cantilever beam
by: Ma Weiyi, et al.
Published: (2019-11-01)

Gold-Diaphragm Based Fabry-Perot Ultrasonic Sensor for Partial Discharge Detection and Localization
by: Wei Zhang, et al.
Published: (2020-01-01)

A Micro Bubble Structure Based Fabry–Perot Optical Fiber Strain Sensor with High Sensitivity and Low-Cost Characteristics
by: Lu Yan, et al.
Published: (2017-03-01)

Sensitivity-Enhanced Extrinsic Fabry–Perot Interferometric Fiber-Optic Microcavity Strain Sensor
by: Zhibo Ma, et al.
Published: (2019-09-01)

Ultrathin graphene diaphragm-based extrinsic Fabry-Perot interferometer for ultra-wideband fiber optic acoustic sensing
by: Ni, Wenjun, et al.
Published: (2019)

Twice-FFT demodulation for signal distortion in optical fiber FP acoustic sensor
by: Ningzhe Xing, et al.
Published: (2020-12-01)

Ultrasensitive Temperature Sensor Based on a Fiber Fabry–Pérot Interferometer Created in a Mercury-Filled Silica Tube
by: Kaiming Yang, et al.
Published: (2015-01-01)

Quasi-distributed network of low-coherence fiber-optic Fabry–Pérot sensors with cavity length-based addressing
by: Katarzyna Karpienko, et al.
Published: (2021-07-01)

Pressure and Temperature Sensor Based on Fiber-Optic Fabry-Perot Interferometer by Phase Demodulation
by: Delin Zhao, et al.
Published: (2019-01-01)

Directional Sensitivity of a MEMS-Based Fiber-Optic Extrinsic Fabry–Perot Ultrasonic Sensor for Partial Discharge Detection
by: Wenrong Si, et al.
Published: (2018-06-01)

A Hermetic Package Technique for Multi-Functional Fiber Sensors through Pressure Boundary of Energy Systems Based on Glass Sealants
by: Zhichun Fan, et al.
Published: (2024-08-01)

Correction: Yan, L., et al. A Micro Bubble Structure Based Fabry–Perot Optical Fiber Strain Sensor with High Sensitivity and Low-Cost Characteristics Sensors, 2017, 17, 555.
by: Lu Yan, et al.
Published: (2018-09-01)

Silicone Rubber Fabry-Perot Pressure Sensor Based on a Spherical Optical Fiber End Face
by: Changxing Jiang, et al.
Published: (2022-02-01)