A „Hybrid“ Thin-Film pH Sensor with Integrated Thick-Film Reference
A reference electrode fabricated by means of thick-film technique is deposited onto a silicon substrate and combined with a thin-film pH sensor to a “hybrid†chip system. To evaluate the suitability of this combination, first investigations were carried out. The characteristics of the thin-...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2001-11-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/1/6/183/ |
| _version_ | 1811306932610269184 |
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| author | Michael J. Schöning Joseph Wang Hans Lüth Thomas Krings Anette Simonis |
| author_facet | Michael J. Schöning Joseph Wang Hans Lüth Thomas Krings Anette Simonis |
| author_sort | Michael J. Schöning |
| collection | DOAJ |
| description | A reference electrode fabricated by means of thick-film technique is deposited onto a silicon substrate and combined with a thin-film pH sensor to a “hybrid†chip system. To evaluate the suitability of this combination, first investigations were carried out. The characteristics of the thin-film pH sensor were studied towards the thick-film Ag/AgCl reference electrode. Measurements were performed in the capacitance/voltage (C/V) and constant capacitance (Concap) mode for different pH values keeping the concentration of chloride ions constant. No difference of the sensor behaviour could be found when comparing the results to measurements, obtained versus a conventional macroscopic Ag/AgCl reference electrode. |
| first_indexed | 2024-04-13T08:55:22Z |
| format | Article |
| id | doaj.art-7a0201c6d85c451d8451fab7c6b865bc |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-13T08:55:22Z |
| publishDate | 2001-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-7a0201c6d85c451d8451fab7c6b865bc2022-12-22T02:53:19ZengMDPI AGSensors1424-82202001-11-011618319210.3390/s10600183A „Hybrid“ Thin-Film pH Sensor with Integrated Thick-Film ReferenceMichael J. SchöningJoseph WangHans LüthThomas KringsAnette SimonisA reference electrode fabricated by means of thick-film technique is deposited onto a silicon substrate and combined with a thin-film pH sensor to a “hybrid†chip system. To evaluate the suitability of this combination, first investigations were carried out. The characteristics of the thin-film pH sensor were studied towards the thick-film Ag/AgCl reference electrode. Measurements were performed in the capacitance/voltage (C/V) and constant capacitance (Concap) mode for different pH values keeping the concentration of chloride ions constant. No difference of the sensor behaviour could be found when comparing the results to measurements, obtained versus a conventional macroscopic Ag/AgCl reference electrode.http://www.mdpi.com/1424-8220/1/6/183/Hybrid sensor chipThick-film reference electrodeThin-film pH sensor |
| spellingShingle | Michael J. Schöning Joseph Wang Hans Lüth Thomas Krings Anette Simonis A „Hybrid“ Thin-Film pH Sensor with Integrated Thick-Film Reference Sensors Hybrid sensor chip Thick-film reference electrode Thin-film pH sensor |
| title | A „Hybrid“ Thin-Film pH Sensor with Integrated Thick-Film Reference |
| title_full | A „Hybrid“ Thin-Film pH Sensor with Integrated Thick-Film Reference |
| title_fullStr | A „Hybrid“ Thin-Film pH Sensor with Integrated Thick-Film Reference |
| title_full_unstemmed | A „Hybrid“ Thin-Film pH Sensor with Integrated Thick-Film Reference |
| title_short | A „Hybrid“ Thin-Film pH Sensor with Integrated Thick-Film Reference |
| title_sort | a¢a€azhybrida¢a€aoe thin film ph sensor with integrated thick film reference |
| topic | Hybrid sensor chip Thick-film reference electrode Thin-film pH sensor |
| url | http://www.mdpi.com/1424-8220/1/6/183/ |
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