An Electrochemical, Low-Frequency Seismic Micro-Sensor Based on MEMS with a Force-Balanced Feedback System
Electrochemical seismic sensors are key components in monitoring ground vibration, which are featured with high performances in the low-frequency domain. However, conventional electrochemical seismic sensors suffer from low repeatability due to limitations in fabrication and limited bandwidth. This...
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| Format: | Article |
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MDPI AG
2017-09-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/17/9/2103 |
| _version_ | 1818037553029185536 |
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| author | Guanglei Li Junbo Wang Deyong Chen Jian Chen Lianhong Chen Chao Xu |
| author_facet | Guanglei Li Junbo Wang Deyong Chen Jian Chen Lianhong Chen Chao Xu |
| author_sort | Guanglei Li |
| collection | DOAJ |
| description | Electrochemical seismic sensors are key components in monitoring ground vibration, which are featured with high performances in the low-frequency domain. However, conventional electrochemical seismic sensors suffer from low repeatability due to limitations in fabrication and limited bandwidth. This paper presents a micro-fabricated electrochemical seismic sensor with a force-balanced negative feedback system, mainly composed of a sensing unit including porous sensing micro electrodes immersed in an electrolyte solution and a feedback unit including a feedback circuit and a feedback magnet. In this study, devices were designed, fabricated, and characterized, producing comparable performances among individual devices. In addition, bandwidths and total harmonic distortions of the proposed devices with and without a negative feedback system were quantified and compared as 0.005–20 (feedback) Hz vs. 0.3–7 Hz (without feedback), 4.34 ± 0.38% (without feedback) vs. 1.81 ± 0.31% (feedback)@1 Hz@1 mm/s and 3.21 ± 0.25% (without feedback) vs. 1.13 ± 0.19% (feedback)@5 Hz@1 mm/s (ndevice = 6, n represents the number of the tested devices), respectively. In addition, the performances of the proposed MEMS electrochemical seismometers with feedback were compared to a commercial electrochemical seismic sensor (CME 6011), producing higher bandwidth (0.005–20 Hz vs. 0.016–30 Hz) and lower self-noise levels (−165.1 ± 6.1 dB vs. −137.7 dB at 0.1 Hz, −151.9 ± 7.5 dB vs. −117.8 dB at 0.02 Hz (ndevice = 6)) in the low-frequency domain. Thus, the proposed device may function as an enabling electrochemical seismometer in the fields requesting seismic monitoring at the ultra-low frequency domain. |
| first_indexed | 2024-12-10T07:28:40Z |
| format | Article |
| id | doaj.art-7a197bac8210471a8197da45cefc0c96 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-12-10T07:28:40Z |
| publishDate | 2017-09-01 |
| publisher | MDPI AG |
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| series | Sensors |
| spelling | doaj.art-7a197bac8210471a8197da45cefc0c962022-12-22T01:57:38ZengMDPI AGSensors1424-82202017-09-01179210310.3390/s17092103s17092103An Electrochemical, Low-Frequency Seismic Micro-Sensor Based on MEMS with a Force-Balanced Feedback SystemGuanglei Li0Junbo Wang1Deyong Chen2Jian Chen3Lianhong Chen4Chao Xu5Institute of Electronics, Chinese Academy of Sciences, Haidian District, Beijing 100190, ChinaInstitute of Electronics, Chinese Academy of Sciences, Haidian District, Beijing 100190, ChinaInstitute of Electronics, Chinese Academy of Sciences, Haidian District, Beijing 100190, ChinaInstitute of Electronics, Chinese Academy of Sciences, Haidian District, Beijing 100190, ChinaInstitute of Electronics, Chinese Academy of Sciences, Haidian District, Beijing 100190, ChinaInstitute of Electronics, Chinese Academy of Sciences, Haidian District, Beijing 100190, ChinaElectrochemical seismic sensors are key components in monitoring ground vibration, which are featured with high performances in the low-frequency domain. However, conventional electrochemical seismic sensors suffer from low repeatability due to limitations in fabrication and limited bandwidth. This paper presents a micro-fabricated electrochemical seismic sensor with a force-balanced negative feedback system, mainly composed of a sensing unit including porous sensing micro electrodes immersed in an electrolyte solution and a feedback unit including a feedback circuit and a feedback magnet. In this study, devices were designed, fabricated, and characterized, producing comparable performances among individual devices. In addition, bandwidths and total harmonic distortions of the proposed devices with and without a negative feedback system were quantified and compared as 0.005–20 (feedback) Hz vs. 0.3–7 Hz (without feedback), 4.34 ± 0.38% (without feedback) vs. 1.81 ± 0.31% (feedback)@1 Hz@1 mm/s and 3.21 ± 0.25% (without feedback) vs. 1.13 ± 0.19% (feedback)@5 Hz@1 mm/s (ndevice = 6, n represents the number of the tested devices), respectively. In addition, the performances of the proposed MEMS electrochemical seismometers with feedback were compared to a commercial electrochemical seismic sensor (CME 6011), producing higher bandwidth (0.005–20 Hz vs. 0.016–30 Hz) and lower self-noise levels (−165.1 ± 6.1 dB vs. −137.7 dB at 0.1 Hz, −151.9 ± 7.5 dB vs. −117.8 dB at 0.02 Hz (ndevice = 6)) in the low-frequency domain. Thus, the proposed device may function as an enabling electrochemical seismometer in the fields requesting seismic monitoring at the ultra-low frequency domain.https://www.mdpi.com/1424-8220/17/9/2103electrochemical seismic sensormicrofabricationnegative feedbackrepeatability |
| spellingShingle | Guanglei Li Junbo Wang Deyong Chen Jian Chen Lianhong Chen Chao Xu An Electrochemical, Low-Frequency Seismic Micro-Sensor Based on MEMS with a Force-Balanced Feedback System Sensors electrochemical seismic sensor microfabrication negative feedback repeatability |
| title | An Electrochemical, Low-Frequency Seismic Micro-Sensor Based on MEMS with a Force-Balanced Feedback System |
| title_full | An Electrochemical, Low-Frequency Seismic Micro-Sensor Based on MEMS with a Force-Balanced Feedback System |
| title_fullStr | An Electrochemical, Low-Frequency Seismic Micro-Sensor Based on MEMS with a Force-Balanced Feedback System |
| title_full_unstemmed | An Electrochemical, Low-Frequency Seismic Micro-Sensor Based on MEMS with a Force-Balanced Feedback System |
| title_short | An Electrochemical, Low-Frequency Seismic Micro-Sensor Based on MEMS with a Force-Balanced Feedback System |
| title_sort | electrochemical low frequency seismic micro sensor based on mems with a force balanced feedback system |
| topic | electrochemical seismic sensor microfabrication negative feedback repeatability |
| url | https://www.mdpi.com/1424-8220/17/9/2103 |
| work_keys_str_mv | AT guangleili anelectrochemicallowfrequencyseismicmicrosensorbasedonmemswithaforcebalancedfeedbacksystem AT junbowang anelectrochemicallowfrequencyseismicmicrosensorbasedonmemswithaforcebalancedfeedbacksystem AT deyongchen anelectrochemicallowfrequencyseismicmicrosensorbasedonmemswithaforcebalancedfeedbacksystem AT jianchen anelectrochemicallowfrequencyseismicmicrosensorbasedonmemswithaforcebalancedfeedbacksystem AT lianhongchen anelectrochemicallowfrequencyseismicmicrosensorbasedonmemswithaforcebalancedfeedbacksystem AT chaoxu anelectrochemicallowfrequencyseismicmicrosensorbasedonmemswithaforcebalancedfeedbacksystem AT guangleili electrochemicallowfrequencyseismicmicrosensorbasedonmemswithaforcebalancedfeedbacksystem AT junbowang electrochemicallowfrequencyseismicmicrosensorbasedonmemswithaforcebalancedfeedbacksystem AT deyongchen electrochemicallowfrequencyseismicmicrosensorbasedonmemswithaforcebalancedfeedbacksystem AT jianchen electrochemicallowfrequencyseismicmicrosensorbasedonmemswithaforcebalancedfeedbacksystem AT lianhongchen electrochemicallowfrequencyseismicmicrosensorbasedonmemswithaforcebalancedfeedbacksystem AT chaoxu electrochemicallowfrequencyseismicmicrosensorbasedonmemswithaforcebalancedfeedbacksystem |