An Electrochemical, Low-Frequency Seismic Micro-Sensor Based on MEMS with a Force-Balanced Feedback System

An Electrochemical, Low-Frequency Seismic Micro-Sensor Based on MEMS with a Force-Balanced Feedback System

Electrochemical seismic sensors are key components in monitoring ground vibration, which are featured with high performances in the low-frequency domain. However, conventional electrochemical seismic sensors suffer from low repeatability due to limitations in fabrication and limited bandwidth. This...

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Bibliographic Details
Main Authors: Guanglei Li, Junbo Wang, Deyong Chen, Jian Chen, Lianhong Chen, Chao Xu
Format: Article
Language:English
Published: MDPI AG 2017-09-01
Series:Sensors
Subjects:
electrochemical seismic sensor
microfabrication
negative feedback
repeatability
Online Access:https://www.mdpi.com/1424-8220/17/9/2103

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