Ellipsometry, transmission, and photoluminescence characterization of Mn-doped ITO thin films deposited by DC magnetron sputtering

Ellipsometry, transmission, and photoluminescence characterization of Mn-doped ITO thin films deposited by DC magnetron sputtering

Manganese-doped indium tin oxide (ITO) thin films (0–12.8 at% Mn) were deposited by DC magnetron sputtering. The structural, electrical, and optical properties of the films were studied. Optical characterization was emphasized and included ellipsometry, transmission, and photoluminescence (PL) measu...

Full description

Bibliographic Details
Main Authors: Masoud Kaveh, David Lawrence, Scott Bender, Daniel Hirt, William Riffe, Costel Constantin
Format: Article
Language:English
Published: IOP Publishing 2023-01-01
Series:Materials Research Express
Subjects:
DC magnetron sputtering
Mn-ITO
thin films
ellipsometry
photoluminescence
bandgap
Online Access:https://doi.org/10.1088/2053-1591/acfecd

Similar Items

Similar Items