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Electron optics column for a new MEMS-type transmission electron microscope

Electron optics column for a new MEMS-type transmission electron microscope

Bibliographic Details
Main Authors: M. Krysztof, T. Grzebyk, A. Górecka-Drzazga, K. Adamski, J. Dziuban
Format: Article
Language:English
Published: Polish Academy of Sciences 2018-04-01
Series:Bulletin of the Polish Academy of Sciences: Technical Sciences
Subjects:
mems
miniature tem
electron emission
focusing of electron beam
electron optics column
Online Access:https://journals.pan.pl/Content/103610/PDF/133-138_00612_Bpasts_66No2_30.04.18_K.pdf
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ISSN:2300-1917

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