SU-8 Electrothermal Actuators: Optimization of Fabrication and Excitation for Long-Term Use

SU-8 Electrothermal Actuators: Optimization of Fabrication and Excitation for Long-Term Use

In this paper we examine the suitability of SU-8 2000 as a construction material for electrothermal actuators and the actuator stability for long-term operation. The fabrication of SU-8 was optimized for mechanical and thermal stability. Samples with different softbake duration, exposure dose and po...

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Bibliographic Details
Main Authors: Thomas Winterstein, Matthias Staab, Christian Nakic, Hans-Jürgen Feige, Jürgen Vogel, Helmut F. Schlaak
Format: Article
Language:English
Published: MDPI AG 2014-12-01
Series:Micromachines
Subjects:
electrothermal actuator
SU-8
long-term stability
pseudo-bimorph
glass transition temperature
Online Access:http://www.mdpi.com/2072-666X/5/4/1310

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