Influence of strain induced by AlN nucleation layer on the electrical properties of AlGaN/GaN heterostructures on Si(111) substrate
The crack-free metal-organic chemical vapor deposition (MOCVD) grown AlGaN/GaN heterostructures on Si substrate with modified growth conditions of AlN nucleation layer (NL) and its influence on the electrical and structural properties of conductive GaN layer are presented. From the Hall electrical m...
Үндсэн зохиолчид: | Dennis Christy, Arata Watanabe, Takashi Egawa |
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Формат: | Өгүүллэг |
Хэл сонгох: | English |
Хэвлэсэн: |
AIP Publishing LLC
2014-10-01
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Цуврал: | AIP Advances |
Онлайн хандалт: | http://dx.doi.org/10.1063/1.4897338 |
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