Obliquely Deposited Titanium Nitride Nanorod Arrays as Surface-Enhanced Raman Scattering Substrates
In this work, titanium nitride (TiN) nanorod arrays were prepared as surface-enhanced Raman scattering (SERS) substrates using glancing angle deposition (GLAD) in a magnetron sputtering system. The nitrogen flow rate was varied from <i>R<sub>N</sub></i><sub>2</sub>...
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MDPI AG
2019-11-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/19/21/4765 |
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| author | Yi-Jun Jen Meng-Jie Lin Hou-Lon Cheang Teh-Li Chan |
| author_facet | Yi-Jun Jen Meng-Jie Lin Hou-Lon Cheang Teh-Li Chan |
| author_sort | Yi-Jun Jen |
| collection | DOAJ |
| description | In this work, titanium nitride (TiN) nanorod arrays were prepared as surface-enhanced Raman scattering (SERS) substrates using glancing angle deposition (GLAD) in a magnetron sputtering system. The nitrogen flow rate was varied from <i>R<sub>N</sub></i><sub>2</sub> = 1 to 3 sccm, yielding five TiN uniform thin films and five TiN nanorod arrays. The figure of merit (FOM) of each TiN uniform film was measured and compared with the SERS signal of each TiN nanorod array. Rhodamine 6G (R6G) was used as the analyte in SERS measurement. For an R6G concentration of 10<sup>−6</sup> M, the analytical enhancement factor (AEF) of the TiN nanorod array that was prepared at <i>R<sub>N</sub></i><sub>2</sub> = 1.5 sccm was 10<sup>4</sup>. The time-durable SERS performance of TiN nanorod arrays was also investigated. |
| first_indexed | 2024-04-13T06:18:06Z |
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| id | doaj.art-7b9bd4fa4ec94a83936a3c204f2212a3 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-13T06:18:06Z |
| publishDate | 2019-11-01 |
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| spelling | doaj.art-7b9bd4fa4ec94a83936a3c204f2212a32022-12-22T02:58:45ZengMDPI AGSensors1424-82202019-11-011921476510.3390/s19214765s19214765Obliquely Deposited Titanium Nitride Nanorod Arrays as Surface-Enhanced Raman Scattering SubstratesYi-Jun Jen0Meng-Jie Lin1Hou-Lon Cheang2Teh-Li Chan3Department of Electro-Optical Engineering, National Taipei University of Technology, Taipei 106, TaiwanDepartment of Electro-Optical Engineering, National Taipei University of Technology, Taipei 106, TaiwanDepartment of Electro-Optical Engineering, National Taipei University of Technology, Taipei 106, TaiwanDepartment of Electro-Optical Engineering, National Taipei University of Technology, Taipei 106, TaiwanIn this work, titanium nitride (TiN) nanorod arrays were prepared as surface-enhanced Raman scattering (SERS) substrates using glancing angle deposition (GLAD) in a magnetron sputtering system. The nitrogen flow rate was varied from <i>R<sub>N</sub></i><sub>2</sub> = 1 to 3 sccm, yielding five TiN uniform thin films and five TiN nanorod arrays. The figure of merit (FOM) of each TiN uniform film was measured and compared with the SERS signal of each TiN nanorod array. Rhodamine 6G (R6G) was used as the analyte in SERS measurement. For an R6G concentration of 10<sup>−6</sup> M, the analytical enhancement factor (AEF) of the TiN nanorod array that was prepared at <i>R<sub>N</sub></i><sub>2</sub> = 1.5 sccm was 10<sup>4</sup>. The time-durable SERS performance of TiN nanorod arrays was also investigated.https://www.mdpi.com/1424-8220/19/21/4765titanium nitridenanorod arrayssurface-enhanced raman scattering |
| spellingShingle | Yi-Jun Jen Meng-Jie Lin Hou-Lon Cheang Teh-Li Chan Obliquely Deposited Titanium Nitride Nanorod Arrays as Surface-Enhanced Raman Scattering Substrates Sensors titanium nitride nanorod arrays surface-enhanced raman scattering |
| title | Obliquely Deposited Titanium Nitride Nanorod Arrays as Surface-Enhanced Raman Scattering Substrates |
| title_full | Obliquely Deposited Titanium Nitride Nanorod Arrays as Surface-Enhanced Raman Scattering Substrates |
| title_fullStr | Obliquely Deposited Titanium Nitride Nanorod Arrays as Surface-Enhanced Raman Scattering Substrates |
| title_full_unstemmed | Obliquely Deposited Titanium Nitride Nanorod Arrays as Surface-Enhanced Raman Scattering Substrates |
| title_short | Obliquely Deposited Titanium Nitride Nanorod Arrays as Surface-Enhanced Raman Scattering Substrates |
| title_sort | obliquely deposited titanium nitride nanorod arrays as surface enhanced raman scattering substrates |
| topic | titanium nitride nanorod arrays surface-enhanced raman scattering |
| url | https://www.mdpi.com/1424-8220/19/21/4765 |
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