Design and Fabrication of a Tunable Optofluidic Microlens Driven by an Encircled Thermo-Pneumatic Actuator
This paper presents the design, simulation, fabrication, assembly, and testing of a miniature thermo-pneumatic optofluidic lens. The device comprises two separate zones for air heating and fluid pressing on a flexible membrane. A buried three-dimensional spiral microchannel connects the two zones wi...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-07-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/13/8/1189 |