A Soft Pressure Sensor Array Based on a Conducting Nanomembrane
Although skin-like pressure sensors exhibit high sensitivity with a high performance over a wide area, they have limitations owing to the critical issue of being linear only in a narrow strain range. Various strategies have been proposed to improve the performance of soft pressure sensors, but such...
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-08-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/12/8/933 |
| _version_ | 1827684725808955392 |
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| author | Daekwang Jung Kyumin Kang Hyunjin Jung Duhwan Seong Soojung An Jiyong Yoon Wooseok Kim Mikyung Shin Hyoung Won Baac Sangmin Won Changhwan Shin Donghee Son |
| author_facet | Daekwang Jung Kyumin Kang Hyunjin Jung Duhwan Seong Soojung An Jiyong Yoon Wooseok Kim Mikyung Shin Hyoung Won Baac Sangmin Won Changhwan Shin Donghee Son |
| author_sort | Daekwang Jung |
| collection | DOAJ |
| description | Although skin-like pressure sensors exhibit high sensitivity with a high performance over a wide area, they have limitations owing to the critical issue of being linear only in a narrow strain range. Various strategies have been proposed to improve the performance of soft pressure sensors, but such a nonlinearity issue still exists and the sensors are only effective within a very narrow strain range. Herein, we fabricated a highly sensitive multi-channel pressure sensor array by using a simple thermal evaporation process of conducting nanomembranes onto a stretchable substrate. A rigid-island structure capable of dissipating accumulated strain energy induced by external mechanical stimuli was adopted for the sensor. The performance of the sensor was precisely controlled by optimizing the thickness of the stretchable substrate and the number of serpentines of an Au membrane. The fabricated sensor exhibited a sensitivity of 0.675 kPa<sup>−1</sup> in the broad pressure range of 2.3–50 kPa with linearity (~0.990), and good stability (>300 Cycles). Finally, we successfully demonstrated a mapping of pressure distribution. |
| first_indexed | 2024-03-10T08:35:13Z |
| format | Article |
| id | doaj.art-7bbdd42441f44c2099da76174f685d8a |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T08:35:13Z |
| publishDate | 2021-08-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-7bbdd42441f44c2099da76174f685d8a2023-11-22T08:44:15ZengMDPI AGMicromachines2072-666X2021-08-0112893310.3390/mi12080933A Soft Pressure Sensor Array Based on a Conducting NanomembraneDaekwang Jung0Kyumin Kang1Hyunjin Jung2Duhwan Seong3Soojung An4Jiyong Yoon5Wooseok Kim6Mikyung Shin7Hyoung Won Baac8Sangmin Won9Changhwan Shin10Donghee Son11Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon 16419, KoreaDepartment of Electrical and Computer Engineering, Sungkyunkwan University, Suwon 16419, KoreaSchool of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, KoreaDepartment of Electrical and Computer Engineering, Sungkyunkwan University, Suwon 16419, KoreaDepartment of Electrical and Computer Engineering, Sungkyunkwan University, Suwon 16419, KoreaDepartment of Electrical and Computer Engineering, Sungkyunkwan University, Suwon 16419, KoreaDepartment of Electrical and Computer Engineering, Sungkyunkwan University, Suwon 16419, KoreaDepartment of Intelligent Precision Healthcare Convergence, Sungkyunkwan University, Suwon 16419, KoreaDepartment of Electrical and Computer Engineering, Sungkyunkwan University, Suwon 16419, KoreaDepartment of Electrical and Computer Engineering, Sungkyunkwan University, Suwon 16419, KoreaDepartment of Electrical and Computer Engineering, Sungkyunkwan University, Suwon 16419, KoreaDepartment of Electrical and Computer Engineering, Sungkyunkwan University, Suwon 16419, KoreaAlthough skin-like pressure sensors exhibit high sensitivity with a high performance over a wide area, they have limitations owing to the critical issue of being linear only in a narrow strain range. Various strategies have been proposed to improve the performance of soft pressure sensors, but such a nonlinearity issue still exists and the sensors are only effective within a very narrow strain range. Herein, we fabricated a highly sensitive multi-channel pressure sensor array by using a simple thermal evaporation process of conducting nanomembranes onto a stretchable substrate. A rigid-island structure capable of dissipating accumulated strain energy induced by external mechanical stimuli was adopted for the sensor. The performance of the sensor was precisely controlled by optimizing the thickness of the stretchable substrate and the number of serpentines of an Au membrane. The fabricated sensor exhibited a sensitivity of 0.675 kPa<sup>−1</sup> in the broad pressure range of 2.3–50 kPa with linearity (~0.990), and good stability (>300 Cycles). Finally, we successfully demonstrated a mapping of pressure distribution.https://www.mdpi.com/2072-666X/12/8/933pressure sensorstretchable electronicspiezoresistiveelectronic skin |
| spellingShingle | Daekwang Jung Kyumin Kang Hyunjin Jung Duhwan Seong Soojung An Jiyong Yoon Wooseok Kim Mikyung Shin Hyoung Won Baac Sangmin Won Changhwan Shin Donghee Son A Soft Pressure Sensor Array Based on a Conducting Nanomembrane Micromachines pressure sensor stretchable electronics piezoresistive electronic skin |
| title | A Soft Pressure Sensor Array Based on a Conducting Nanomembrane |
| title_full | A Soft Pressure Sensor Array Based on a Conducting Nanomembrane |
| title_fullStr | A Soft Pressure Sensor Array Based on a Conducting Nanomembrane |
| title_full_unstemmed | A Soft Pressure Sensor Array Based on a Conducting Nanomembrane |
| title_short | A Soft Pressure Sensor Array Based on a Conducting Nanomembrane |
| title_sort | soft pressure sensor array based on a conducting nanomembrane |
| topic | pressure sensor stretchable electronics piezoresistive electronic skin |
| url | https://www.mdpi.com/2072-666X/12/8/933 |
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