2D Au-Coated Resonant MEMS Scanner for NIR Fluorescence Intraoperative Confocal Microscope
The electrostatic MEMS scanner plays an important role in the miniaturization of the microscopic imaging system. We have developed a new two-dimensional (2D) parametrically-resonant MEMS scanner with patterned Au coating (>90% reflectivity at an NIR 785-nm wavelength), for a near-infrared (NI...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-04-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/10/5/295 |
| _version_ | 1818563972953014272 |
|---|---|
| author | Cheng-You Yao Bo Li Zhen Qiu |
| author_facet | Cheng-You Yao Bo Li Zhen Qiu |
| author_sort | Cheng-You Yao |
| collection | DOAJ |
| description | The electrostatic MEMS scanner plays an important role in the miniaturization of the microscopic imaging system. We have developed a new two-dimensional (2D) parametrically-resonant MEMS scanner with patterned Au coating (>90% reflectivity at an NIR 785-nm wavelength), for a near-infrared (NIR) fluorescence intraoperative confocal microscopic imaging system with a compact form factor. A silicon-on-insulator (SOI)-wafer based dicing-free microfabrication process has been developed for mass-production with high yield. Based on an in-plane comb-drive configuration, the resonant MEMS scanner performs 2D Lissajous pattern scanning with a large mechanical scanning angle (MSA, ±4°) on each axis at low driving voltage (36 V). A large field-of-view (FOV) has been achieved by using a post-objective scanning architecture of the confocal microscope. We have integrated the new MEMS scanner into a custom-made NIR fluorescence intraoperative confocal microscope with an outer diameter of 5.5 mm at its distal-end. Axial scanning has been achieved by using a piezoelectric actuator-based driving mechanism. We have successfully demonstrated ex vivo 2D imaging on human tissue specimens with up to five frames/s. The 2D resonant MEMS scanner can potentially be utilized for many applications, including multiphoton microendoscopy and wide-field endoscopy. |
| first_indexed | 2024-12-14T01:23:19Z |
| format | Article |
| id | doaj.art-7c0a1e7611cc47b28e49e0fa62e3c4ff |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-12-14T01:23:19Z |
| publishDate | 2019-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-7c0a1e7611cc47b28e49e0fa62e3c4ff2022-12-21T23:22:18ZengMDPI AGMicromachines2072-666X2019-04-0110529510.3390/mi10050295mi100502952D Au-Coated Resonant MEMS Scanner for NIR Fluorescence Intraoperative Confocal MicroscopeCheng-You Yao0Bo Li1Zhen Qiu2Department of Biomedical Engineering, Michigan State University, East Lansing, MI 48823, USAInstitute for Quantitative Health Science and Engineering, Michigan State University, East Lansing, MI 48823, USADepartment of Biomedical Engineering, Michigan State University, East Lansing, MI 48823, USAThe electrostatic MEMS scanner plays an important role in the miniaturization of the microscopic imaging system. We have developed a new two-dimensional (2D) parametrically-resonant MEMS scanner with patterned Au coating (>90% reflectivity at an NIR 785-nm wavelength), for a near-infrared (NIR) fluorescence intraoperative confocal microscopic imaging system with a compact form factor. A silicon-on-insulator (SOI)-wafer based dicing-free microfabrication process has been developed for mass-production with high yield. Based on an in-plane comb-drive configuration, the resonant MEMS scanner performs 2D Lissajous pattern scanning with a large mechanical scanning angle (MSA, ±4°) on each axis at low driving voltage (36 V). A large field-of-view (FOV) has been achieved by using a post-objective scanning architecture of the confocal microscope. We have integrated the new MEMS scanner into a custom-made NIR fluorescence intraoperative confocal microscope with an outer diameter of 5.5 mm at its distal-end. Axial scanning has been achieved by using a piezoelectric actuator-based driving mechanism. We have successfully demonstrated ex vivo 2D imaging on human tissue specimens with up to five frames/s. The 2D resonant MEMS scanner can potentially be utilized for many applications, including multiphoton microendoscopy and wide-field endoscopy.https://www.mdpi.com/2072-666X/10/5/295resonant MEMS scannerelectrostaticparametric resonanceNIR fluorescenceintraoperative microscope2D Lissajousfluorescence confocal |
| spellingShingle | Cheng-You Yao Bo Li Zhen Qiu 2D Au-Coated Resonant MEMS Scanner for NIR Fluorescence Intraoperative Confocal Microscope Micromachines resonant MEMS scanner electrostatic parametric resonance NIR fluorescence intraoperative microscope 2D Lissajous fluorescence confocal |
| title | 2D Au-Coated Resonant MEMS Scanner for NIR Fluorescence Intraoperative Confocal Microscope |
| title_full | 2D Au-Coated Resonant MEMS Scanner for NIR Fluorescence Intraoperative Confocal Microscope |
| title_fullStr | 2D Au-Coated Resonant MEMS Scanner for NIR Fluorescence Intraoperative Confocal Microscope |
| title_full_unstemmed | 2D Au-Coated Resonant MEMS Scanner for NIR Fluorescence Intraoperative Confocal Microscope |
| title_short | 2D Au-Coated Resonant MEMS Scanner for NIR Fluorescence Intraoperative Confocal Microscope |
| title_sort | 2d au coated resonant mems scanner for nir fluorescence intraoperative confocal microscope |
| topic | resonant MEMS scanner electrostatic parametric resonance NIR fluorescence intraoperative microscope 2D Lissajous fluorescence confocal |
| url | https://www.mdpi.com/2072-666X/10/5/295 |
| work_keys_str_mv | AT chengyouyao 2daucoatedresonantmemsscannerfornirfluorescenceintraoperativeconfocalmicroscope AT boli 2daucoatedresonantmemsscannerfornirfluorescenceintraoperativeconfocalmicroscope AT zhenqiu 2daucoatedresonantmemsscannerfornirfluorescenceintraoperativeconfocalmicroscope |