Analysis of Optical Diffraction Profiles Created by Phase-Modulating MEMS Micromirror Arrays

Analysis of Optical Diffraction Profiles Created by Phase-Modulating MEMS Micromirror Arrays

This paper presents modeling and analysis of light diffraction and light-intensity modulation performed by an optical phased array (OPA) system based on metal-coated silicon micromirrors. The models can be used in the design process of a microelectromechanical system (MEMS)-based OPA device to predi...

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Bibliographic Details
Main Authors: Tarek Mohammad, Siyuan He, Ridha Ben Mrad
Format: Article
Language:English
Published: MDPI AG 2021-07-01
Series:Micromachines
Subjects:
diffractive optics
light steering
micromirror arrays
optical phase control
spatial light modulator
surface micromachining
Online Access:https://www.mdpi.com/2072-666X/12/8/891

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