Plasma-activated high-strength non-isothermal anodic bonding for efficient fabrication of the micro atomic vapor cells
Microfabricated alkali metal vapor cells are the core components for miniaturizing quantum devices, such as atomic clocks, atomic gyroscopes, and atomic magnetometers. Alkali metals are prone to thermal migration at the bonding interface during the sealing of the vapor cell, which leads to bonding f...
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| Format: | Article |
| Language: | English |
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Elsevier
2023-11-01
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| Series: | Journal of Materials Research and Technology |
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| Online Access: | http://www.sciencedirect.com/science/article/pii/S223878542302478X |
| _version_ | 1827346148808982528 |
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| author | Mingzhi Yu Yao Chen Yanbin Wang Yintao Ma Guoxi Luo Shun Lu Libo Zhao Ping Yang Qijing Lin Zhuangde Jiang |
| author_facet | Mingzhi Yu Yao Chen Yanbin Wang Yintao Ma Guoxi Luo Shun Lu Libo Zhao Ping Yang Qijing Lin Zhuangde Jiang |
| author_sort | Mingzhi Yu |
| collection | DOAJ |
| description | Microfabricated alkali metal vapor cells are the core components for miniaturizing quantum devices, such as atomic clocks, atomic gyroscopes, and atomic magnetometers. Alkali metals are prone to thermal migration at the bonding interface during the sealing of the vapor cell, which leads to bonding failure. In this study, a non-isothermal anodic bonding process based on plasma activation was developed to achieve high-strength bonding at low temperatures using the temperature gradient to keep the alkali metal away from the bonding interface. This procedure eliminates interference from the alkali metal and significantly increases the success rate of anodic bonding of vapor cells. Simulation results for the temperature field and the residual stresses during anodic bonding demonstrate that the procedure is theoretically feasible. The effect of plasma treatment on the contact angle and roughness of the bonding surface revealed a mechanism for improving the bond strength. In addition, the construction of an integrated processing platform made it possible to perform non-isothermal anode bonding, injection of alkali metal, filling of inert gases, and recovery and recycling of noble gases. The high strength and good hermeticity of the bonding interface were demonstrated by the bond strength, cross-sectional high-resolution transmission electron microscopy observations, and leakage rate tests. Finally, the absorption spectrum and free-induction decay signal of the fabricated vapor cell were measured. |
| first_indexed | 2024-03-07T23:23:53Z |
| format | Article |
| id | doaj.art-7c45d083331b42b8be0dd1f736d3f5c2 |
| institution | Directory Open Access Journal |
| issn | 2238-7854 |
| language | English |
| last_indexed | 2024-03-07T23:23:53Z |
| publishDate | 2023-11-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Journal of Materials Research and Technology |
| spelling | doaj.art-7c45d083331b42b8be0dd1f736d3f5c22024-02-21T05:25:50ZengElsevierJournal of Materials Research and Technology2238-78542023-11-012710461057Plasma-activated high-strength non-isothermal anodic bonding for efficient fabrication of the micro atomic vapor cellsMingzhi Yu0Yao Chen1Yanbin Wang2Yintao Ma3Guoxi Luo4Shun Lu5Libo Zhao6Ping Yang7Qijing Lin8Zhuangde Jiang9State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an 710049, China; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, ChinaState Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an 710049, China; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China; Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing, Yantai 265503, China; Corresponding author. State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an 710049, China.State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an 710049, China; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, ChinaState Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an 710049, China; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, ChinaState Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an 710049, China; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China; Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing, Yantai 265503, ChinaState Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an 710049, China; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China; Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing, Yantai 265503, ChinaState Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an 710049, China; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China; Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing, Yantai 265503, China; Corresponding author. School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China.State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an 710049, China; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China; Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing, Yantai 265503, ChinaState Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an 710049, China; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China; Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing, Yantai 265503, ChinaState Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an 710049, China; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China; Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing, Yantai 265503, ChinaMicrofabricated alkali metal vapor cells are the core components for miniaturizing quantum devices, such as atomic clocks, atomic gyroscopes, and atomic magnetometers. Alkali metals are prone to thermal migration at the bonding interface during the sealing of the vapor cell, which leads to bonding failure. In this study, a non-isothermal anodic bonding process based on plasma activation was developed to achieve high-strength bonding at low temperatures using the temperature gradient to keep the alkali metal away from the bonding interface. This procedure eliminates interference from the alkali metal and significantly increases the success rate of anodic bonding of vapor cells. Simulation results for the temperature field and the residual stresses during anodic bonding demonstrate that the procedure is theoretically feasible. The effect of plasma treatment on the contact angle and roughness of the bonding surface revealed a mechanism for improving the bond strength. In addition, the construction of an integrated processing platform made it possible to perform non-isothermal anode bonding, injection of alkali metal, filling of inert gases, and recovery and recycling of noble gases. The high strength and good hermeticity of the bonding interface were demonstrated by the bond strength, cross-sectional high-resolution transmission electron microscopy observations, and leakage rate tests. Finally, the absorption spectrum and free-induction decay signal of the fabricated vapor cell were measured.http://www.sciencedirect.com/science/article/pii/S223878542302478XAlkali metal vapor cellPlasma activationNon-isothermal anodic bondingNoble-gas recycling |
| spellingShingle | Mingzhi Yu Yao Chen Yanbin Wang Yintao Ma Guoxi Luo Shun Lu Libo Zhao Ping Yang Qijing Lin Zhuangde Jiang Plasma-activated high-strength non-isothermal anodic bonding for efficient fabrication of the micro atomic vapor cells Journal of Materials Research and Technology Alkali metal vapor cell Plasma activation Non-isothermal anodic bonding Noble-gas recycling |
| title | Plasma-activated high-strength non-isothermal anodic bonding for efficient fabrication of the micro atomic vapor cells |
| title_full | Plasma-activated high-strength non-isothermal anodic bonding for efficient fabrication of the micro atomic vapor cells |
| title_fullStr | Plasma-activated high-strength non-isothermal anodic bonding for efficient fabrication of the micro atomic vapor cells |
| title_full_unstemmed | Plasma-activated high-strength non-isothermal anodic bonding for efficient fabrication of the micro atomic vapor cells |
| title_short | Plasma-activated high-strength non-isothermal anodic bonding for efficient fabrication of the micro atomic vapor cells |
| title_sort | plasma activated high strength non isothermal anodic bonding for efficient fabrication of the micro atomic vapor cells |
| topic | Alkali metal vapor cell Plasma activation Non-isothermal anodic bonding Noble-gas recycling |
| url | http://www.sciencedirect.com/science/article/pii/S223878542302478X |
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