Trimming of Imperfect Cylindrical Fused Silica Resonators by Chemical Etching

Trimming of Imperfect Cylindrical Fused Silica Resonators by Chemical Etching

The cylindrical resonator gyroscope (CRG) is a kind of solid-state gyroscope with a wide application market. The cylindrical resonator is the key component of CRG, whose quality factor and symmetry will directly affect the performance of the gyroscope. Due to the material properties and fabrication...

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Bibliographic Details
Main Authors: Yunfeng Tao, Yao Pan, Shilong Jin, Yonglei Jia, Kaiyong Yang, Hui Luo
Format: Article
Language:English
Published: MDPI AG 2019-08-01
Series:Sensors
Subjects:
cylindrical resonator
frequency split
chemical trimming
Online Access:https://www.mdpi.com/1424-8220/19/16/3596

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