Thermal laser evaporation for the growth of oxide films
Thermal laser evaporation (TLE) is a particularly promising technique for the growth of metal films. Here, we demonstrate that TLE is also suitable for the growth of amorphous and polycrystalline oxide films. We report on a spectrum of binary oxide films that have been deposited by laser-induced eva...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2021-08-01
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| Series: | APL Materials |
| Online Access: | http://dx.doi.org/10.1063/5.0055237 |