Acoustic Waves in Piezoelectric Layered Structure for Selective Detection of Liquid Viscosity

Acoustic Waves in Piezoelectric Layered Structure for Selective Detection of Liquid Viscosity

The acoustic waves of higher orders propagating in a layered structure consisting of a silicon plate coated with piezoelectric <i>ZnO</i> and/or <i>AlN</i> films were used for the development of a sensor with selective sensitivity to liquid viscosity <i>η</i> in t...

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Bibliographic Details
Main Authors: Andrey Smirnov, Vladimir Anisimkin, Elizaveta Shamsutdinova, Maria-Assunta Signore, Luca Francioso, Kirill Zykov, Vladimir Baklaushev, Iren Kuznetsova
Format: Article
Language:English
Published: MDPI AG 2023-08-01
Series:Sensors
Subjects:
acoustic plate mode
silicon plate
piezoelectric film
liquid viscosity
Online Access:https://www.mdpi.com/1424-8220/23/17/7329

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