Basic study on AFM probe using a low rigidity spring
Demands for machining of three-dimensional (3D) complex geometries over a large area with nanometer scale accuracy have recently increased in the various industrial sectors. In order to meet such requirements, it is necessary to realize not only a machine tool with nanometer scale machining accuracy...
| Main Authors: | , |
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| Format: | Article |
| Language: | Japanese |
| Published: |
The Japan Society of Mechanical Engineers
2017-11-01
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| Series: | Nihon Kikai Gakkai ronbunshu |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/transjsme/83/855/83_17-00127/_pdf/-char/en |
| _version_ | 1811221160820473856 |
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| author | Hiroshi SAWANO Takuya MATSUMOTO |
| author_facet | Hiroshi SAWANO Takuya MATSUMOTO |
| author_sort | Hiroshi SAWANO |
| collection | DOAJ |
| description | Demands for machining of three-dimensional (3D) complex geometries over a large area with nanometer scale accuracy have recently increased in the various industrial sectors. In order to meet such requirements, it is necessary to realize not only a machine tool with nanometer scale machining accuracy, but also a coordinate measuring machine with a nanometer scale measuring resolution for evaluating the machined parts profile. A scanning tunneling microscopy (STM) and atomic force microscope (AFM) probes have a high measuring resolution. However, in the STM, the specimen to be measured needs to have conductivity, and the AFM cannot measure a step shape or a slope. It is thought that the application of the profile measurement by the AFM probe can be expanded, by development the AFM probe suitable for the measurement of the slope shape. Therefore, this study proposed a novel AFM probe suitable for measuring the slope shape by using a low rigidity spring. In addition, the basic characteristics of the proposed AFM probe was experimentally investigated. Investigation results confirmed that the proposed AFM probe can detect atomic forces acting between the specimen and the probe. |
| first_indexed | 2024-04-12T07:53:11Z |
| format | Article |
| id | doaj.art-7c9901bb2cf84c6fbd3db3d9788e3244 |
| institution | Directory Open Access Journal |
| issn | 2187-9761 |
| language | Japanese |
| last_indexed | 2024-04-12T07:53:11Z |
| publishDate | 2017-11-01 |
| publisher | The Japan Society of Mechanical Engineers |
| record_format | Article |
| series | Nihon Kikai Gakkai ronbunshu |
| spelling | doaj.art-7c9901bb2cf84c6fbd3db3d9788e32442022-12-22T03:41:32ZjpnThe Japan Society of Mechanical EngineersNihon Kikai Gakkai ronbunshu2187-97612017-11-018385517-0012717-0012710.1299/transjsme.17-00127transjsmeBasic study on AFM probe using a low rigidity springHiroshi SAWANO0Takuya MATSUMOTO1Department of Mechanical Engineering, School of Science and Technology, Meiji UniversityDepartment of Mechanical Engineering, School of Science and Technology, Meiji UniversityDemands for machining of three-dimensional (3D) complex geometries over a large area with nanometer scale accuracy have recently increased in the various industrial sectors. In order to meet such requirements, it is necessary to realize not only a machine tool with nanometer scale machining accuracy, but also a coordinate measuring machine with a nanometer scale measuring resolution for evaluating the machined parts profile. A scanning tunneling microscopy (STM) and atomic force microscope (AFM) probes have a high measuring resolution. However, in the STM, the specimen to be measured needs to have conductivity, and the AFM cannot measure a step shape or a slope. It is thought that the application of the profile measurement by the AFM probe can be expanded, by development the AFM probe suitable for the measurement of the slope shape. Therefore, this study proposed a novel AFM probe suitable for measuring the slope shape by using a low rigidity spring. In addition, the basic characteristics of the proposed AFM probe was experimentally investigated. Investigation results confirmed that the proposed AFM probe can detect atomic forces acting between the specimen and the probe.https://www.jstage.jst.go.jp/article/transjsme/83/855/83_17-00127/_pdf/-char/enatomic force microscopyafm probeprofile measurementslope shape measurementlow rigidity spring |
| spellingShingle | Hiroshi SAWANO Takuya MATSUMOTO Basic study on AFM probe using a low rigidity spring Nihon Kikai Gakkai ronbunshu atomic force microscopy afm probe profile measurement slope shape measurement low rigidity spring |
| title | Basic study on AFM probe using a low rigidity spring |
| title_full | Basic study on AFM probe using a low rigidity spring |
| title_fullStr | Basic study on AFM probe using a low rigidity spring |
| title_full_unstemmed | Basic study on AFM probe using a low rigidity spring |
| title_short | Basic study on AFM probe using a low rigidity spring |
| title_sort | basic study on afm probe using a low rigidity spring |
| topic | atomic force microscopy afm probe profile measurement slope shape measurement low rigidity spring |
| url | https://www.jstage.jst.go.jp/article/transjsme/83/855/83_17-00127/_pdf/-char/en |
| work_keys_str_mv | AT hiroshisawano basicstudyonafmprobeusingalowrigidityspring AT takuyamatsumoto basicstudyonafmprobeusingalowrigidityspring |