Basic study on AFM probe using a low rigidity spring
Demands for machining of three-dimensional (3D) complex geometries over a large area with nanometer scale accuracy have recently increased in the various industrial sectors. In order to meet such requirements, it is necessary to realize not only a machine tool with nanometer scale machining accuracy...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | Japanese |
| Published: |
The Japan Society of Mechanical Engineers
2017-11-01
|
| Series: | Nihon Kikai Gakkai ronbunshu |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/transjsme/83/855/83_17-00127/_pdf/-char/en |