Electron-Beam Radiation Effects in Multilayer Structures Grown with the Periodical Deposition of Si and CaF<sub>2</sub> on Si(111)

Electron-Beam Radiation Effects in Multilayer Structures Grown with the Periodical Deposition of Si and CaF<sub>2</sub> on Si(111)

The formation of CaSi<sub>2</sub> films on Si(111) with the molecular-beam epitaxy (MBE) of CaF<sub>2</sub> under fast electron-beam irradiation was investigated. The method of a high-planarity CaSi<sub>2</sub> film synthesis assisted by electron-beam irradiation...

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Bibliographic Details
Main Authors:	Anatoly V. Dvurechenskii, Aleksey V. Kacyuba, Gennady N. Kamaev, Vladimir A. Volodin, Natalia P. Stepina, Aigul F. Zinovieva, Vladimir A. Zinovyev
Format:	Article
Language:	English
Published:	MDPI AG 2023-05-01
Series:	Materials Proceedings
Subjects:	crystal structure nanostructures electron-beam radiation molecular-beam epitaxy calcium compounds silicon
Online Access:	https://www.mdpi.com/2673-4605/14/1/68

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