Measurement of Effects of Different Substrates on the Mechanical Properties of Submicron Titanium Nickel Shape Memory Alloy Thin Film Using the Bulge Test
This study investigated the effects of different substrates on the mechanical properties of Ti-60at%Ni shape memory alloys (SMA). Two types of samples were prepared for this experiment: (1) a Ti-60at%Ni deposited on SiNx, and (2) a Ti-60at%Ni deposited on SiNx/Cr; both had a 600 nm thick film of Ti-...
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-01-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/12/1/85 |
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| author | Nhat Minh Dang Zhao-Ying Wang Ti-Yuan Wu Tra Anh Khoa Nguyen Ming-Tzer Lin |
| author_facet | Nhat Minh Dang Zhao-Ying Wang Ti-Yuan Wu Tra Anh Khoa Nguyen Ming-Tzer Lin |
| author_sort | Nhat Minh Dang |
| collection | DOAJ |
| description | This study investigated the effects of different substrates on the mechanical properties of Ti-60at%Ni shape memory alloys (SMA). Two types of samples were prepared for this experiment: (1) a Ti-60at%Ni deposited on SiNx, and (2) a Ti-60at%Ni deposited on SiNx/Cr; both had a 600 nm thick film of Ti-60at%Ni. Deposition was done using the physical vapor deposition (PVD) process, and the microstructural changes and crystallization phase changes were observed through scanning electron microscopy (SEM) and X-ray diffraction (XRD). The results showed that the TiNi thin film with a Cr adhesion layer had better mechanical properties. The bulge test showed that TiNi thin film with a Cr adhesion had a higher Young’s modulus and lower residual stress. From the thermal cycling experiment, it was found that the Cr adhesion layer buffered the mismatch between TiNi and SiNx. Additionally, the thermal cycling test was also used to measure the thermal expansion coefficient of the films, and the fatigue test showed that the Cr layer significantly improved the fatigue resistance of the TiNi film. |
| first_indexed | 2024-03-09T04:36:56Z |
| format | Article |
| id | doaj.art-7de3e2ca03ae4d36aed234594465a9c7 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T04:36:56Z |
| publishDate | 2021-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-7de3e2ca03ae4d36aed234594465a9c72023-12-03T13:27:00ZengMDPI AGMicromachines2072-666X2021-01-011218510.3390/mi12010085Measurement of Effects of Different Substrates on the Mechanical Properties of Submicron Titanium Nickel Shape Memory Alloy Thin Film Using the Bulge TestNhat Minh Dang0Zhao-Ying Wang1Ti-Yuan Wu2Tra Anh Khoa Nguyen3Ming-Tzer Lin4Graduate Institute of Precision Engineering, National Chung Hsing University Taichung, Taichung 40749, TaiwanGraduate Institute of Precision Engineering, National Chung Hsing University Taichung, Taichung 40749, TaiwanGraduate Institute of Precision Engineering, National Chung Hsing University Taichung, Taichung 40749, TaiwanGraduate Institute of Precision Engineering, National Chung Hsing University Taichung, Taichung 40749, TaiwanGraduate Institute of Precision Engineering, National Chung Hsing University Taichung, Taichung 40749, TaiwanThis study investigated the effects of different substrates on the mechanical properties of Ti-60at%Ni shape memory alloys (SMA). Two types of samples were prepared for this experiment: (1) a Ti-60at%Ni deposited on SiNx, and (2) a Ti-60at%Ni deposited on SiNx/Cr; both had a 600 nm thick film of Ti-60at%Ni. Deposition was done using the physical vapor deposition (PVD) process, and the microstructural changes and crystallization phase changes were observed through scanning electron microscopy (SEM) and X-ray diffraction (XRD). The results showed that the TiNi thin film with a Cr adhesion layer had better mechanical properties. The bulge test showed that TiNi thin film with a Cr adhesion had a higher Young’s modulus and lower residual stress. From the thermal cycling experiment, it was found that the Cr adhesion layer buffered the mismatch between TiNi and SiNx. Additionally, the thermal cycling test was also used to measure the thermal expansion coefficient of the films, and the fatigue test showed that the Cr layer significantly improved the fatigue resistance of the TiNi film.https://www.mdpi.com/2072-666X/12/1/85shape memory alloysbulge testCr adhesion layerresidual stress |
| spellingShingle | Nhat Minh Dang Zhao-Ying Wang Ti-Yuan Wu Tra Anh Khoa Nguyen Ming-Tzer Lin Measurement of Effects of Different Substrates on the Mechanical Properties of Submicron Titanium Nickel Shape Memory Alloy Thin Film Using the Bulge Test Micromachines shape memory alloys bulge test Cr adhesion layer residual stress |
| title | Measurement of Effects of Different Substrates on the Mechanical Properties of Submicron Titanium Nickel Shape Memory Alloy Thin Film Using the Bulge Test |
| title_full | Measurement of Effects of Different Substrates on the Mechanical Properties of Submicron Titanium Nickel Shape Memory Alloy Thin Film Using the Bulge Test |
| title_fullStr | Measurement of Effects of Different Substrates on the Mechanical Properties of Submicron Titanium Nickel Shape Memory Alloy Thin Film Using the Bulge Test |
| title_full_unstemmed | Measurement of Effects of Different Substrates on the Mechanical Properties of Submicron Titanium Nickel Shape Memory Alloy Thin Film Using the Bulge Test |
| title_short | Measurement of Effects of Different Substrates on the Mechanical Properties of Submicron Titanium Nickel Shape Memory Alloy Thin Film Using the Bulge Test |
| title_sort | measurement of effects of different substrates on the mechanical properties of submicron titanium nickel shape memory alloy thin film using the bulge test |
| topic | shape memory alloys bulge test Cr adhesion layer residual stress |
| url | https://www.mdpi.com/2072-666X/12/1/85 |
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