Measurement of Effects of Different Substrates on the Mechanical Properties of Submicron Titanium Nickel Shape Memory Alloy Thin Film Using the Bulge Test

Measurement of Effects of Different Substrates on the Mechanical Properties of Submicron Titanium Nickel Shape Memory Alloy Thin Film Using the Bulge Test

This study investigated the effects of different substrates on the mechanical properties of Ti-60at%Ni shape memory alloys (SMA). Two types of samples were prepared for this experiment: (1) a Ti-60at%Ni deposited on SiNx, and (2) a Ti-60at%Ni deposited on SiNx/Cr; both had a 600 nm thick film of Ti-...

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Bibliographic Details
Main Authors: Nhat Minh Dang, Zhao-Ying Wang, Ti-Yuan Wu, Tra Anh Khoa Nguyen, Ming-Tzer Lin
Format: Article
Language:English
Published: MDPI AG 2021-01-01
Series:Micromachines
Subjects:
shape memory alloys
bulge test
Cr adhesion layer
residual stress
Online Access:https://www.mdpi.com/2072-666X/12/1/85

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